常用碳基固体润滑薄膜的研究现状与展望  

Research Status and Prospect of Common Carbon-based Solid Lubricating Films

作　　者：石佳东 韩翠红 刘倩 马国政[2] 王海斗 李国禄[1] SHI Jia-dong;HAN Cui-hong;LIU Qian;MA Guo-zheng;WANG Hai-dou;LI Guo-lu(School of Materials Science and Engineering,Hebei University of Technology,Tianjin 300130,China;Key Laboratory of National Defense Science and Technology of Equipment Remanufacturing Technology,Army Academy of Armored Forces,Beijing 100072,China;School of Engineering and Technology,China University of Geosciences,Beijing 100083,China)

机构地区：[1]河北工业大学材料科学与工程学院,天津300130 [2]陆军装甲兵学院装备再制造技术国防科技重点实验室,北京100072 [3]中国地质大学(北京)工程技术学院,北京100083

出　　处：《表面技术》2020年第8期81-96,137,共17页Surface Technology

基　　金：“十三五”装备预研项目(61409230603;61409220205);清华大学摩擦学国家实验室开放基金(SKLTKF16A05)。

摘　　要：首先从碳基固体润滑薄膜的应用需求与成本效益出发,探讨了研究碳基固体润滑薄膜的迫切要求和重要意义,然后对类金刚石(DLC)薄膜、类富勒烯(FLC)薄膜及石墨烯薄膜三类最常用的碳基固体润滑薄膜的研究现状进行了较详细的介绍。其中,重点介绍了DLC薄膜的三种减摩抗磨机理,探讨了掺杂元素改性对DLC薄膜硬度、摩擦系数和磨损率等多个方面的影响,并指出外部因素(基体材料、过渡层和应用环境等)对DLC薄膜性能的重要作用。探讨了掺氢、掺氟和掺氮对FLC薄膜构性转变和摩擦学性能的影响。总体来说,氟掺杂导致FLC结构变化,并显著改变薄膜硬度;掺氮会诱导类富勒烯微结构的增加;掺氢FLC薄膜热处理后可达到超润滑状态。总结了石墨烯薄膜制备工艺的发展、石墨烯基复合薄膜的摩擦学性能和石墨烯薄膜在不同基体材料的应用。最后,指出了碳基润滑薄膜领域亟待解决的关键难题,并对未来的研究方向做出了预测。Firstly,the significance and urgent requirements of studying carbon-based solid lubricating films was analyzed based on the application requirements and cost-effectiveness of carbon-based solid lubricating films.Then,the research status of three common carbon-based solid lubricating films including diamond-like carbon(DLC)films,fullerene-like carbon(FLC)films and graphene films was introduced in detail.the three anti-friction and anti-wear mechanisms of DLC films were expo-unded emphatically,the influence of doped elements on the hardness,friction coefficient and wear rate of DLC films was discussed,and the important role of external factors(matrix material,transition layer and application environment,etc.)on the performance of DLC films was pointed out.The effects of hydrogen,fluorine,and nitrogen on the structural transformation and tribological properties of FLC films were discussed.In general,fluorine doping caused FLC structure changes and significantly changed film hardness.Nitrogen doping induced an increase in fullerene-like microstructure.Hydrogen-doped FLC film could reach super-lubricated state after heat treatment.The development of the graphene film preparation process,the tribological properties of graphene-based composite films,and the application of graphene films to different substrate materials were summarized.Finally,the key problems to be solved in the field of carbon-based lubricating films were pointed out,and the future research directions were predicted.

关 键 词：碳基润滑薄膜 类金刚石薄膜 类富勒烯薄膜 石墨烯 摩擦学 

分 类 号：O484[理学—固体物理] TG174.4[理学—物理]