碳化硅涂层在单晶硅用炭/炭热场材料中的应用及研究进展  

Application and research progress of silicon carbide coating in carbon/carbon thermal field materials for monocrystalline silicon

作　　者：程皓 白鸽[1] 赵杉 康媛媛 康文杰 苏君明 张永辉 Cheng Hao;Bai Ge;Zhao Shan;Kang Yuan-yuan;Kang Wen-jie;Su Jun-ming;Zhang Yong-hui(Xi'an Chaoma Technology Co.,Ltd.,Shaanxi Xi'an 710025,China;Xi'an Aerospace Composite Materials Institute,Shaanxi Xi’an 710025,China)

机构地区：[1]西安超码科技有限公司,陕西西安710025 [2]西安航天复合材料研究所,陕西西安710025

出　　处：《炭素技术》2020年第3期6-8,24,共4页Carbon Techniques

摘　　要：碳化硅涂层是目前解决单晶硅生产用炭/炭热场材料高温侵蚀的有效手段之一,本文介绍了碳化硅涂层的制备技术及优缺点,综述了碳化硅涂层在炭/炭热场材料领域的应用及研究进展,对炭/炭热场材料高温抗侵蚀涂层的发展提出了建议和方向。Silicon carbide coating technology is one of the effective methods to solve the high temperature oxidation erosion of carbon/carbon thermal field materials used for the production of single crystal silicon.The preparation and properties of silicon carbide coatings are introduced.The application and research progress in the field of carbon/carbon thermal field materials are reviewed,and the future development direction of high temperature anti-oxidation coatings for carbon/carbon thermal field materials is put forward.

关 键 词：炭/炭热场材料 碳化硅涂层 直拉法 

分 类 号：TB332[一般工业技术—材料科学与工程]