激光埋种辅助刻蚀制备微凹透镜阵列  

Concave microlens arrays through an etching-assisted laser seeding method

作　　者：刘墨南 杨罕[2] 孙洪波[2] LIU MoNan;YANG Han;SUN Hong-Bo(Department of Condensed Matter Physics,College of Physics,Jilin University,Changchun 130012,China;State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China)

机构地区：[1]吉林大学物理学院,凝聚态物理系,长春130012 [2]吉林大学电子科学与工程学院,集成光电子重点实验室,长春130012

出　　处：《中国科学：物理学、力学、天文学》2020年第8期16-23,共8页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家自然科学基金(编号:51501070)资助项目。

摘　　要：微透镜阵列作为微光学领域的一种重要元件,如何实现其高效加工一直是本领域亟需解决的技术环节.但是传统加工方法无法兼顾加工效率和加工质量,激光埋种辅助刻蚀方法可实现微凹透镜阵列的高效制备和微加工.本文回顾了这种新微加工方法的一系列探索工作,即采用空间光调制器对飞秒激光进行相位调制,提供一种"激光埋种辅助刻蚀"的方法.该方法利用相位调制得到的多个焦点替代单个焦点进行曝光,实现了对微凹透镜阵列的并行加工;同时,结合对多个焦点的相对能量和空间位置的调节,能够实现对每个微凹透镜形貌和光学参数的调控;从根本上改变了以往激光直写加工中对微纳结构逐点扫描的加工方式,从而实现了微阵列结构的高效、高质量加工.Microlens arrays are crucial optical elements in micro-optics.However,their efficient fabrication is difficult.High efficiency and quality cannot be simultaneously achieved using conventional fabrication methods;therefore,we propose a novel and efficient method based on the single-pulse exposure of femtosecond lasers and etching-assisted prototyping.When developing this novel microfabrication method,we systematically reviewed several studies.Furthermore,we employed phase modulation using a spatial light modulator to realize the laser seeding-etching microfabrication method.The phase modulation enabled multi-focus exposure instead of single-focus exposure,realizing parallel fabrication in case of concave microlens arrays.Further,combined with the tuning of relative energy and the spatial arrangement of multiple foci,the morphology and optical parameters of each concave microlens can be controlled.The proposed method fundamentally changes the"point-to-point"scanning strategy adopted in conventional micro-nanofabrications via laser direct writing,which is an efficient and high-quality method for fabricating microarray structures.

关 键 词：单脉冲曝光 飞秒激光 微透镜阵列 微加工 

分 类 号：TH74[机械工程—光学工程] TN249[机械工程—仪器科学与技术]