MEMS陀螺自适应分段温度补偿方法  

Temperature compensation method for MEMS gyroscope based on adaptive piecewise fitting

作　　者：沈晓卫 常瑞花[2] 周泉 左东广 SEN Xiaowei;CHANG Ruihua;ZHOU Quan;ZUO Dongguang(College of Nuclear Engineering,Rocket Force University of Engineering,Xi'an 710025,China;College of Information Engineering,Engineering University of CAPF,Xi'an 710086,China)

机构地区：[1]火箭军工程大学核工程学院,陕西西安710025 [2]武警工程大学信息工程学院,陕西西安710086

出　　处：《传感器与微系统》2020年第8期26-29,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61179005,61179004)。

摘　　要：针对微机电系统(MEMS)陀螺零偏受温度影响较大的问题,提出一种自适应分段温度补偿方法。根据全温度区间下温度曲线的变化关系,设计一种规则自动提取合适的拐点;以拐点作为分段区间的端点,将温度曲线划分为多个不等间距的单调区间,并对各个区间温度曲线进行多项式拟合,形成陀螺的零偏温度模型;通过温度模型计算陀螺当前温度下的零偏值,再从陀螺输出中去除零偏,完成温度零偏标定。实验结果表明:与传统固定分段线性拟合相比,所提方法拟合系数更少,最大误差由2.56×10^-2(°)/s减小为0.51×10^-2(°)/s,能够有效补偿温度变化范围较宽、非线性变化情况下的陀螺温度零偏,工程实用性强。Aiming at the problem that the bias of micro-electro-mechanical system(MEMS)gyroscope is susceptible to temperature,a temperature compensation method based on adaptive piecewise fitting is proposed.According to the relationship of the temperature curve variation in full temperature range,an appropriate inflection points are extracted based on some rules.Taking inflection points as the endpoints of segmented interval,the temperature curve is divided into a plurality of unequal spacing.Each interval temperature curve is fitted by po1 ynomial method,and bias temperature compensation model is formed.Then the gyroscope bias is calculated by the model,and the calibration is finished by removing the bias from the gyroscope output.The experimental results show that the proposed method has less fitting coefficient compared to the traditional fixed piecewise linear fitting,and the maximum error is reduced from 2.56×10^-2(°)/s to 0.51×10^-2(°)/s.The proposed method can compensate the bias under the condition of wide variation range and nonlinear change,which is suitable for practical engineering.

关 键 词：微机电系统(MEMS)陀螺 零偏 温度补偿 分段拟合 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] U666.1[自动化与计算机技术—控制科学与工程]