氩气流量对非平衡磁控溅射Ti/WS2复合薄膜结构和摩擦学性能的影响  

Effect of Argon Flow Rate on the Structure and Tribological Properties of Ti/WS2 Composite Films by Unblanced Magnetron Sputtering

作　　者：蔡海潮 王景华[2] 叶军[3] 韩江[1] 薛玉君[3] 王东峰[2] CAI Haichao;WANG Jinghua;YE Jun;HAN Jiang;XUE Yujun;WANG Dongfeng(School of Mechanical Engineering,Hefei University of Technology,Hefei Anhui 230009,China;Luoyang Bearing Research Institute Co.,Ltd.,Luoyang Henan 471039,China;School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang Henan 471003,China)

机构地区：[1]合肥工业大学机械工程学院,安徽合肥230009 [2]洛阳轴承研究所有限公司,河南洛阳471039 [3]河南科技大学机电工程学院,河南洛阳471003

出　　处：《润滑与密封》2020年第8期36-40,46,共6页Lubrication Engineering

基　　金：河南省科技攻关项目(202102210073)。

摘　　要：采用非平衡磁控溅射技术制备Ti/WS2复合薄膜。利用扫描电镜(SEM)、能谱仪(EDS)、纳米压痕仪和摩擦磨损试验机分别对复合薄膜的微观形貌、成分、硬度以及摩擦磨损性能进行测试,研究氩气流量对Ti/WS2复合薄膜微观形貌和摩擦学性能的影响。结果表明:随着氩气流量增加,Ti/WS2复合薄膜的疏松结构明显改善,薄膜致密度得到了提高,且Ti/WS2复合薄膜的(002)晶面择优取向增强;随着氩气流量的增加,Ti/WS2复合薄膜的摩擦因数呈现逐渐降低趋势,磨损率逐渐减小,且磨损机制由明显的磨粒磨损特征转变为轻微的磨粒磨损特征,呈现出较好的耐磨性。Ti/WS2 composite films were prepared by unbalanced magnetron sputtering.Scanning electron microscopy(SEM),energy dispersive spectroscopy(EDS),nano indentation and friction and wear testing machine were used to test the micro morphology,composition,hardness and friction and wear properties of the composite films.The effect of argon flow rate on the micro morphology and tribological properties of Ti/WS2 composite films was studied.The results show that with the increase of argon flow rate,the loose structure of Ti/WS2 composite film is improved obviously,and the film density is increased,and the preferred orientation of(002)crystal surface of Ti/WS2 composite film is enhanced.With the increase of argon flow rate,the friction coefficient and wear rate of Ti/WS2 composite film is decreased gradually,and the wear mechanism changes from obvious abrasive wear characteristics to slight abrasive wear characteristics,showing better wear resistance.

关 键 词：非平衡磁控溅射 Ti/WS2复合薄膜 摩擦因数 流量 

分 类 号：TH117[机械工程—机械设计及理论]