高反镜疵病尺寸变化与激光散射场分布关系的仿真研究  

Simulation Study on Relationship Between Size of High Reflector Defects and Distribution of Laser Scattering Field

作　　者：江坤 高爱华[1] 刘卫国[1] 孙雪平[1] 杨鹏飞 闫丽荣[1] JIANG Kun;GAO Aihua;LIU Weiguo;SUN Xueping;YANG Pengfei;YAN Lirong(College of Optoelectronic Engineering,Xi'an Technological University,Xi'an 710021,China)

机构地区：[1]西安工业大学光电工程学院,西安710021

出　　处：《电光与控制》2020年第8期42-46,共5页Electronics Optics & Control

基　　金：国防科工局基金(JCKY201608A001);陕西省重点研发项目(2019GY-063)。

摘　　要：高反镜通常用于激光陀螺、高能激光系统等国防领域,在加工过程中不可避免地引入表面疵病,会破坏高反射膜系甚至基底,严重影响其性能。目前高反射镜表面较为复杂的疵病依然是研究的重点。针对疵病的光散射特性,结合有限元(FEM)对截面为三角形的连续重复型划痕疵病建立电磁仿真模型,研究高斯光束入射时不同尺寸疵病的积分散射光强变化和不同位置处探测空间散射分布的区别,得到疵病散射光强曲线,能够反映出疵病尺寸变化与积分散射分布的关系以及空间散射最佳探测位置。研究结果对高反射镜表面疵病无损探测方法的研究具有一定的理论指导价值。The high reflector is usually used in laser gyroscope,high-energy laser system and other national defense fields.Surface defects are unavoidable in the process of processing,which will seriously damage the high-reflective film system and even the substrate,and seriously affect its performance.At present,the complex surface defects of the high reflector are still the focus of research.In view of the light scattering characteristics of the defects,an electromagnetic simulation model of repetitive continuous scratch defects with a triangular cross section is established by using the Finite Element Method(FEM).The variation of integral scattering intensity of defects with different sizes and the difference of detection spatial scattering distribution at different locations are studied when a Gaussian beam is incident,and the curve of light scattering intensity of defects is obtained.It can reflect the relationship between defect size and integral scattering distribution and the optimal detection location of spatial scattering.The research results can provide a theoretical guidance for the research of nondestructive detection methods for surface defects of the high reflector.

关 键 词：高反镜 疵病 有限元 散射场 无损探测 

分 类 号：TN247[电子电信—物理电子学]