量子级联激光器研究进展  

Progress in Quantum Cascade Lasers

作　　者：刘峰奇[1,2] 张锦川 刘俊岐[1,2] 卓宁[1] 王利军 刘舒曼[1,2] 翟慎强[1] 梁平 胡颖[1] 王占国 Liu Fengqi;Zhang Jinchuan;Liu Junqi;Zhuo Ning;Wang Lijun;Liu Shuman;Zhai Shenqiang;Liang Ping;Hu Ying;Wang Zhanguo(Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所半导体材料科学重点实验室,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《中国激光》2020年第7期71-83,共13页Chinese Journal of Lasers

基　　金：国家自然科学基金(61435014,61627822);中国科学院前沿科学重点研究计划(QYZDJ-SSW-JSC027)。

摘　　要：因量子级联激光器的工作波长可覆盖红外到太赫兹波段,在大气污染检测、工业污染监控、医学诊断、毒品及生化危险品灵敏检测、自由空间通信等领域具有广泛的应用前景。从1994年问世到现在,量子级联激光器已经从最初的实验室原理器件发展到可实用化的红外波段最具发展前景的半导体激光器。本文从量子级联激光器设计思路的演进、工作波长范围的扩展、提高输出功率、实现单模的宽调谐、提高光束质量等方面依次介绍相应的研究进展,最后给出简要总结与展望。Quantum cascade lasers(QCL)emission wavelength spans from infrared to terahertz(THz),lead to many applications such as pollution monitoring,industrial process control,medical diagnostics,narcotic drugs and biochemical dangerous goods sensitive detection,and free space optical communications.Invented in 1994 following many years of research on band-structure engineered semiconductors and devices grown by molecular beam epitaxy,this fundamentally new laser has rapidly advanced to a leading position among infrared and terahertz semiconductor lasers in terms of practical wavelength agility as well as power and temperature performance.In this paper,we review the the progresses in designing concept of QCL,expanding wavelength range,increasing output power,realizing broadly tunable single-mode operation,and enhancing the beam quality in sequence.Finally,we give the brief conclusion and possible outlook.

关 键 词：激光器 量子效应 隧穿 量子级联激光器 

分 类 号：TN365[电子电信—物理电子学]