蔡司GeminiSEM 300型场发射扫描电镜常见故障的预防、排除和磁性样品的测试方法  

Precaution and elimination of common faults in Zeiss GeminiSEM300 field emission scanning electron microscopeand the test methods for magnetic specimens

作　　者：陈佳阳[1] 陈耀文 CHEN Jia-yang;CHEN Yao-wen(Central Laboratory,Shantou University,Shantou Guangdong 515000,China)

机构地区：[1]汕头大学中心实验室,广东汕头515000

出　　处：《电子显微学报》2020年第4期423-425,共3页Journal of Chinese Electron Microscopy Society

摘　　要：扫描电镜故障的预防和及时排除对于延长扫描电镜的使用寿命,节约维修成本有着重要的意义。本文详细总结了蔡司GeminiSEM 300型场发射扫描电子显微镜(field emission scanning electron microscope,FESEM)可能发生的一些故障,以及故障发生的原因、排除方法和预防措施,并介绍了测试磁性样品时的工作条件,希望对同行有参考的作用。It is of great significance to prevent and eliminate the faults of scanning electron microscope(SEM)in time for prolonging the service life of SEM and saving the maintenance cost.This paper summarizes in detail the causes,elimination and precaution of the possible faults in Zeiss GeminiSEM300 FESEM.Work conditions for magnetic specimens were also introduced in this paper.

关 键 词：扫描电镜 故障排除 预防措施 磁性样品 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] TN16[金属学及工艺—金属学]