大口径强激光光学元件超精密制造技术研究进展  

Progress on ultra precision manufacturing technology of large-aperture high-power laser optics

作　　者：樊非 徐曦[1] 许乔[1] 王健[1] 钟波[1] 谢瑞清[1] 雷向阳[1] 陈贤华[1] 汪圣飞 侯晶[1] 邓文辉[1] 安晨辉 周炼 赵世杰[1] 廖德锋[1] 朱玉洁 Fan Fei;Xu Xi;Xu Qiao;Wang Jian;Zhong Bo;Xie Ruiqing;Lei Xiangyang;Chen Xianhua;Wang Shengfei;Hou Jing;Deng Wenhui;An Chenhui;Zhou Lian;Zhao Shijie;Liao Defeng;Zhu Yujie(Research Centre of Laser Fusion,China Academy of Engineering Physics,Mianyang,Sichuan 621900,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光电工程》2020年第8期1-13,共13页Opto-Electronic Engineering

基　　金：国家科技重大专项(2017ZX04022001-101)

摘　　要：惯性约束聚变高功率固体激光装置研制对大口径光学元件提出了全频段精度控制指标要求,以及高效率、批量化制造需求。本文围绕“超精密、确定性”强激光光学元件全流程制造方法,总结了近几年大口径强激光光学元件超精密制造技术取得的重要进展,重点介绍了单点金刚石超精密切削技术、非球面超精密数控磨削技术、确定性抛光技术等一系列关键技术,以及相关工艺及装备在强激光光学元件批量制造流程线中的应用情况。The construction of high-power solid-state laser facility for inertial confinement fusion requires to precisely control the full-spatial frequency error,and realize efficient mass-manufacturing of large-aperture optics.This review summarizes the recent critical progress in manufacturing of large-aperture optics in high-power laser facility.It also emphasizes the technologies such as single point diamond fly-cutting,and aspheric ultra-precision grinding,as well as deterministic polishing,based on the deterministic ultra-precision process manufacturing method.In addition,the application status of these key technologies in the mass-manufacturing chain was stated specifically.

关 键 词：高功率固体激光装置 大口径光学元件 光学超精密制造技术 确定性抛光 

分 类 号：TH74[机械工程—光学工程]