基于MEMS加速度计阵列的测斜仪设计  

Design of inclinometer based on MEMS accelerometer array

作　　者：石永强 李雨菲 车录锋[2] SHI Yongqiang;LI Yufei;CHE Lufeng(College of Biomedical Engineering&Instrument Science,Zhejiang University,Hangzhou 310007,China;College of Information Science&Electronic Engineering,Zhejiang University,Hangzhou 310007,China)

机构地区：[1]浙江大学生物医学工程与仪器科学学院,浙江杭州310007 [2]浙江大学信息与电子工程学院,浙江杭州310007

出　　处：《传感器与微系统》2020年第9期66-68,72,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(41674181);国家科技重大专项课题资助项目(2017ZX05008-008)。

摘　　要：针对岩土工程边坡失稳现象中岩土内部位移变化监测需求,设计制作了一种基于微机电系统(MEMS)加速度计阵列的测斜仪。该测斜仪系统由一个基于STM32控制模块和8个由三轴的加速度计单元模块构成。各单元模块空间位置改变,各加速度计的输出经模数转换后通过串口传输到PC端,利用卡尔曼滤波算法与基于欧拉角的姿态解析算法,实现测斜仪倾斜变化以二维图形方式显示。Aiming at the monitoring of the internal displacement change of the geotechnical displacement in the phenomenon of geotechnical slope instability,an inclinometer based on micro-electro-mechanical system(MEMS)acceleration sensor array is designed and manufactured.The inclinometer system consists of a control module based on STM32 and eight acceleration sensor modules with three axes.The spatial position of each unit module changes,the output of each accelerometer is transmitted to the PC through the serial port after analog-to-digital conversion,Kalman filtering algorithm and attitude analysis algorithm based on Euler angle are used to realize the tilt change of the inclinometer to be displayed in two-dimensional graphics.

关 键 词：阵列式测斜仪 微机电系统(MEMS)加速度计 卡尔曼滤波 姿态解析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP277[自动化与计算机技术—控制科学与工程]