VDMOS功率循环试验中结温在线监测方法研究  

Research on on-line monitoring method of junction temperature in power cycling test of VDMOS

作　　者：黄东巍[1] 吕贤亮[1] 李旭 Huang Dongwei;Lv Xianliang;Li Xu(China Electronics Standardization Institute,Beijing 100176,China)

机构地区：[1]中国电子技术标准化研究院,北京100176

出　　处：《国外电子测量技术》2020年第7期73-77,共5页Foreign Electronic Measurement Technology

基　　金：装备发展部共性项目(1807WK0011)资助。

摘　　要：提出一种VDMOS器件功率循环试验中的结温在线监测方法,通过研究功率循环试验中的在线测温原理,提出利用功率循环试验中VDMOS器件在导通态下的漏源电流、漏源电压与温度的对应关系以及器件在关断态下的PN结结电压与温度的对应关系进行结温在线测量。设计了结温在线监测系统,试验结果表明,该系统可实现在规定结温变化范围内对VDMOS器件进行功率循环试验并实时在线测量和控制VDMOS器件结温,可在功率循环试验过程中的器件导通态温度上升阶段和关断态温度下降阶段分别对器件结温进行实时监测和控制。In this paper,an on-line monitoring method of junction temperature in power cycling test of VDMOS devices is proposed.Based on the study of the principle of on-line temperature measurement in power cycling test,the on-line measurement of junction temperature is proposedby using the corresponding relationship between drain source current,drain source voltage and temperature of VDMOS devices in on-state,and the corresponding relationship between PN junction voltage and temperature of devices in off-state.The on-line temperature measurement system in power cycling test isdesigned.The test results show that,the on-line temperature measurement system can realize the power cycling test of VDMOS devices within the specified temperature range,and realize on-line measurement and control of junction temperature of VDMOS devices.The device’junction temperature can be monitored and controlled in the on-state and off-state in the power cycling test.

关 键 词：功率循环 导通态 关断态 结温在线测量 

分 类 号：TN305.94[电子电信—物理电子学]