基于振动节点优化提高双频激光干涉仪的测量精度  

Improving Measurement Accuracy of Dual-Frequency Laser Interferometer Based on Vibration Node Optimization

作　　者：于海娇 赵国罡 Yu Haijiao;Zhao Guogang(College of Electrical and Information,Jilin Unicersity of Architecture and Technology,Changchun,Jilin 130114,China;College of Computer Science and Eugineering,Jilin University of Architecture and Technology,Changchun,Jilin 130114,Chinat)

机构地区：[1]吉林建筑科技学院电气信息工程学院,吉林长春130114 [2]吉林建筑科技学院计算机科学与工程学院,吉林长春130114

出　　处：《激光与光电子学进展》2020年第15期92-99,共8页Laser & Optoelectronics Progress

摘　　要：双频激光干涉仪在纳米测量技术领域中的应用十分广泛,在特定的使用环境中,如何减小测量系统存在的误差,提高系统的测量精度变得越来越重要。鉴于此,提出一种利用测量环境中的振型节点减小环境振动,提高双频激光千涉仪测量精度的方法。先从理论的角度分析该方案的可行性,基于此理论搭建实验测量系统,再利用加速度传感器找到测量系统中的节点位置,最后测试双频激光干涉仪在振型节点位置和其他非节点位置处的测量重复性水平。实验结果表明:当外界存在振源时,所提方法在非振型节点位置的测量重复性为±9nm,振型节点位置的测董重复性为±4nm,即节点位置处双频激光干涉仪的测量精度相对非节点位置提高了125%,证明了该方法的有效性。Dual-requency laser interferometers are widely used in the field of nanometer measurement.Particular uIsage context,reducing the errors in a measurement system and improving the measurement accuracy of the system becomes increasingly important.Accordingly,a method is proposed herein to use the vibration modal nodes in the measurement environment to reduce environmental vibrations and improve the measurement accuracy of a dual-frequency laser interferometer.First,the feasibility of the scheme is analyzed from a theoretical perspective,and the experimental measurement system is built based on this theory.Then,the node position in the measurement system is found by using an acceleration sensor.Finally,the measurement repeatability of the dual-frequency laser interferometer in the modal node position and other non-modal node positions are tested.Experimental results show that when there is an external vibration source,the measurement repeatability of the proposed method in the non-modal node position is±9nm,and that of the modal node position is±4 nm.Thus,the measurement accuracy of the dual-frequency laser interferometer in the node position is 125%higher than that in the non-modal node position,which confirms the cffectiveness of this method.

关 键 词：测量 干涉仪 测量精度 振型节点 频率响应函数 

分 类 号：O436[机械工程—光学工程]