铜反射镜车削刀纹修抛工艺技术研究  

Research on the technology of polishing crafts of copper mirror turning blade pattern

作　　者：陈翔翔 李宏 郭忠达[1] 阳志强[1] 刘嘉缘 CHEN Xiangxiang;LI Hong;GUO Zhongda;YANG Zhiqiang;LIU Jiayuan(School of Optoelectronic Engineering,Xian Technological University,Xian 710021,China)

机构地区：[1]西安工业大学光电工程学院,西安710021

出　　处：《光学技术》2020年第4期495-501,共7页Optical Technique

基　　金：陕西省重点研发计划项目(2017ZDXM-GY-122);陕西省教育厅重点实验室科研计划项目(18JS052)。

摘　　要：单点金刚石车削技术虽然可以使铜反射镜获得较好的表面粗糙度,但同时也产生了车削刀纹,刀纹引起镜面光的散射现象,严重影响系统的光学性能。为研究去除铜反射镜车削刀纹的修抛工艺最佳参数,采用4因素4水平正交实验法,通过ZJP350平面精磨抛光机进行抛光工艺实验,以及Zygo Newview 8200白光干涉仪对铜反射镜的刀纹去除情况和表面粗糙度进行检测。结果表明:铜镜胶盘的方法会使铜镜表面产生划痕以及塌边现象,而阻尼布手工修抛法则可避免这些问题。实验得到了最佳修抛工艺参数,可使铜基反射镜表面刀纹去除,粗糙度平均值达到2.387nm,低于初始数据。证明该方法可在不破坏车削精度的前提下去除车削刀纹,对其他金属反射镜刀纹去除的研究具有参考意义。Although the single-point diamond turning technology can achieve better surface roughness of the copper mirror,it also produces turning blade patterns,which cause the scattering of specular light and seriously affect the optical performance of the system.In order to study the optimal parameters of the repairing and polishing process to remove the cutting edges of the copper mirror,the four-factor four-level orthogonal experiment method was used to perform the polishing process experiment with the ZJP350 plane fine polishing machine and the Zygo Newview 8200 white light interferometer on the copper mirror removal and surface roughness of the blade are checked.The results show that the method of the copper mirror rubber disc cause scratches and sags on the surface of the copper mirror,and the manual polishing method of the damping cloth can avoid these problems.The best polishing process parameters were obtained through experiments,which can remove the knife marks on the surface of the copper-based mirror,and the average roughness reached 2.387 nm,which is lower than the initial data.It is proved that the method can remove the turning blade pattern without jeopardizing the turning accuracy,and it has reference significance for the research on the removal of other metal mirror blade patterns.

关 键 词：应用光学 光学元件加工 去除车削刀纹 阻尼布修抛 正交实验 

分 类 号：TG176[金属学及工艺—金属表面处理]