S型折叠式微悬臂梁刚度仿真与测试  

Simulation and Test of Stiffness of S-shaped Folded Serpentine Micro-cantilevers

作　　者：邹显楠 郝永平[1] 秦宇[2] 陈良玉[2] 刘双杰 ZOU Xiannan;HAO Yongping;QIN Yu;CHEN Liangyu;LIU Shuangjie(School of Mechanical Engineering,Shenyang Ligong University,Shenyang Liaoning 110159,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang Liaoning 110819,China)

机构地区：[1]沈阳理工大学机械工程学院,辽宁沈阳110159 [2]东北大学机械工程与自动化学院,辽宁沈阳110819

出　　处：《机床与液压》2020年第17期158-161,共4页Machine Tool & Hydraulics

基　　金：辽宁省自然科学基金指导计划(20170540791)。

摘　　要：为弥补现有测试微悬臂梁刚度方法中存在的不足,采用准LIGA工艺加工了一种S型折叠式微悬臂梁,对其x向和y向的刚度进行了仿真;采用自行设计并制作的刚度测试系统对该微悬臂梁进行了测试,测试结果与仿真结果的相对误差低于2%。研究结果表明:利用所设计的测试系统测试微悬臂梁刚度具有较高的准确性,为微悬臂梁进一步的优化设计和工艺改进提供了一种有效的分析手段。In order to compensate shortcomings of existing methods for testing stiffness of micro-cantilever,a type of S-shaped folded serpentine micro-cantilever was processed by using the quasi LIGA process,and the x-direction stiffness and y-direction stiffness of the micro-cantilever were simulated.The self-designed and self-manufactured stiffness test system was used to test the micro-cantilever,and the relative error between the test results and the simulation results was less than 2%.The results show that the test system can be used to measure the stiffness of the micro-cantileverwith high accuracy.It provides an effective analytical method for the further optimization design and process improvement of micro-cantilevers.

关 键 词：准LIGA工艺 微悬臂梁 刚度 测试系统 

分 类 号：TH703[机械工程—仪器科学与技术]