换能器间距对柔性声表面波器件性能的影响  

Effect of the distances between two interdigital transducers on the performance of flexible surface acoustic wave devices

作　　者：何兴理[1] 黄诗浩[1] 林金阳[1] HE Xingli;HUANG Shihao;LIN Jinyang(Research Center for Microelectronics Technology, Fujian University of Technology, Fuzhou 350118, China)

机构地区：[1]福建工程学院微电子技术研究中心,福建福州350118

出　　处：《福建工程学院学报》2020年第4期349-352,共4页Journal of Fujian University of Technology

基　　金：福建省自然科学基金项目(2017J05097)。

摘　　要：首先基于PEI基板磁控溅射ZnO薄膜,再在薄膜上的两端制备叉指电极,探讨了不同的叉指间距对这种柔性器件的影响。研究发现,当两个叉指式换能器(IDT)之间的距离增加时,谐振器的传输幅度会显著衰减。为了制造具有良好传输性能的器件,IDT之间的间距应小于声波波长的40倍。这些结果可以为柔性声波器件的发展提供参考。ZnO thin film was sputtered by magnetron on the PET substrate,and then interdigitated electrodes were prepared on both ends of the thin film.The effect of different interdigital spacing on this flexible device was discussed.It was found that the transmission amplitude of the resonator attenuates significantly when the distance between two interdigited transducers(IDT)increases.In order to manufacture devices with good transmission performance,the spacing between IDTs should be less than 40 times of the acoustic wavelength.These results can provide reference for the development of flexible acoustic devices.

关 键 词：叉指换能器 声表面波 氧化锌 

分 类 号：TP37[自动化与计算机技术—计算机系统结构]