Energy variation in diffusive void nucleation induced by electromigration  

作　　者：Yuexing Wang Yao Yao Zhang Long Leon Keer 

机构地区：[1]Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621999,China [2]School of Civil Engineering,Xi'an University of Architecture and Technology,Xisan 710055,China [3]School of Mechanics,Civil Engineering and Architecture,Northwestern Polytechnical University,Xi5an 710072,China [4]Department of Civil and Environmental Engineering,Northwestern University,Evanston,IL 60208,USA

出　　处：《Acta Mechanica Sinica》2020年第4期866-872,共7页力学学报（英文版）

基　　金：support by the National Natural Science Foundation of China(Grant 11772257);Natural Science Foundation of Shaanxi Providence(Grant 2020JM-103);Fundamental Research Funds for the Central Universities(Grant G2019KY05212).

摘　　要：An energy approach is proposed to describe electromigration induced void nucleation based on phase transformation theory.The chemical potential for an individual migrated atom is predicted by diffusion induced back stress equivalent principle.After determining the chemical potential for the dilfusing atoms,the Gibbs free energy controlling the void nucleation can be determined and the mass diffusion process is considered.The critical void radius and nucleation time are determined analytically when the Gibbs free energy approaches the extreme value.The theoretical predictions are compared with the experimental results from literatures and show good accuracy.The proposed model can also be applied to other diffusion induced damage processes such as thermomigration and stress migration.

关 键 词：ENERGY ELECTROMIGRATION Void nucleation DIFFUSION 

分 类 号：O552.2[理学—热学与物质分子运动论]