利用PECVD快速沉积超厚类金刚石碳基薄膜技术  

Rapid Preparation of Super Thick Diamond-like Carbon Films by PECVD

作　　者：魏徐兵 尚伦霖 鲁志斌[1,2] 张广安 WEI Xubing;SHANG Lunlin;LU Zhibin;ZHANG Guangan(Lanzhou Institute of Chemical Physics,CAS,Lanzhou 730000,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院兰州化学物理研究所,兰州730000 [2]中国科学院大学,北京100049

出　　处：《真空与低温》2020年第5期402-409,共8页Vacuum and Cryogenics

基　　金：国家基金委青年科学基金(11905273)。

摘　　要：汽车发动机、管道防腐蚀、航空航天领域的特殊应用要求类金刚石碳(DLC)膜的厚度达到10~50μm。虽然DLC膜层越厚,其耐磨耐腐蚀等性能越好,但内应力也随之增大,制备难度增加。等离子体增强化学气相沉积(PECVD)是制备DLC薄膜的主要手段之一,具有沉积速率快、沉积温度低、可沉积厚膜等优点,同时能够实现形状复杂工件表面DLC膜层的沉积。本文介绍采用PECVD技术在平面工件表面、活塞环表面和管道内表面快速沉积压应力(贫Si层)和张应力(富Si层)交替的超厚DLC膜层。研究结果表明,在M2高速钢和活塞环功能面上均能沉积30μm以上的DLC膜,膜层的摩擦学性能优异;在管道内壁沉积的DLC膜厚度在10μm以上,耐蚀性能和摩擦学性能良好。总之,可以利用PECVD在不同形状的工件上快速沉积具有良好耐磨性和耐腐蚀性能的、超厚DLC膜层。The applications in the automotive engine,pipeline anticorrosive,aerospace fields require the thickness of diamond-like carbon(DLC)films up to 10~50μm,and the thicker DLC films possess the better wear resistance and anticorrosive properties.However,the internal stress increases with the increase of DLC films thickness,which greatly increases the deposition difficulty.Plasmaenhanced chemical vapor deposition(PECVD)is one of the main methods to deposit DLC films,which possesses many advantages,such asthe fast deposition rate,the low deposition temperature and thick film deposition,and the deposition of DLC films on the surface of workpiece with complex shapes.In this paper,super thick DLC films,alterative compressive stress(Six-DLC)and tensile stress(Siy-DLC),were deposited rapidly on the surface of plane workpiece,piston ring functional surface and pipes inner surface by PECVD technology.The results show that the thickness of DLC films on the surface of M2 high speed steel and the functional surfaces of piston ring are over 30μm,and show the excellent wear resistance and low friction coefficient.In addition,the film thickness of DLC deposited on the inner wall of the metal pipes is more than 10μm,showing excellent corrosion resistance and tribological properties.Therefore,PECVD can be used to deposit quickly super thick DLC films on work piece of different shapes,which can be used to improve the wear resistance and corrosion resistance of the workpiece.

关 键 词：等离子体增强化学气相沉积 超厚类金刚石碳膜 快速沉积 耐磨损 耐腐蚀 

分 类 号：O484[理学—固体物理]