压头曲率半径对硬质薄膜结合力划痕测量影响的比较研究  

Comparative Study on the Influence of Curvature Radius of Needle Tip on Scratch Test of Hard Film Bonding Force

作　　者：于杰 陶兴付 秦林[1] 李晓兵 YU Jie;TAO Xing-fu;QIN Lin;LI Xiao-bing(Research Institute of Surface Engineering,Taiyuan University of Technology,Taiyuan,Shanxi 030024,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]太原理工大学表面工程研究所,山西太原030024 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2020年第9期1089-1094,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2016YFF0204305)。

摘　　要：硬质薄膜的膜/基结合力是表征材料可靠性的重要特性参数。采用划痕法测试硬质薄膜的结合力时,有很多因素会影响到临界载荷L c的判定,例如薄膜和基底的硬度、模量,薄膜的表面粗糙度等;此外,仪器机架刚度、划痕速率、压头的曲率半径等仪器的测量参数也会影响临界载荷L c的判定。采用划痕测量法,研究了曲率半径为20μm,50μm和100μm的压头对单晶硅和304基底的亚微米类金刚石薄膜与基底的结合力测量的影响。研究结果显示:随着压头曲率半径的增加,2种材料的临界载荷也随之增大。The film/base bonding force is an important characteristic parameter of the hard film materials.In the adhesion test of the hard film by the scratch method,there are many factors that affect the determination of the critical load L c,such as the hardness&modulus of the film and the substrate,the surface roughness of the film,and so on.In addition,the test parameters including the instrument stiffness,the scratch rate,the radius of curvature of the indenter,etc.,also affect the determination of the critical load L c.The effects of three indenters with different radius of curvature(20μm,50μm and 100μm)on the adhesion test of diamond-like carbon films with thickness of submicron were studied.Two differents substrate(i.e.single crystal silicon and 304 steel)were considered.The critical load of the two materials increases,as the increase of the radius of curvature of the tip.

关 键 词：计量学 压头曲率半径 类金刚石薄膜 膜/基结合力 划痕法 

分 类 号：TB93[一般工业技术—计量学]