极化静电力驱动的高粘液膜整平研究  

Research on Leveling of High-Mucous Membrane Driven by Polarized Electrostatic Force

作　　者：徐征[1] 杨秋野 王晓东[2] 钱艳文 徐晓羽 XU Zheng;YANG Qiu-ye;WANG Xiao-dong;QIAN Yan-wen;XU Xiao-yu(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116085,China)

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024 [2]大连理工大学精密/特种加工及微制造技术教育部重点实验室,辽宁大连116085

出　　处：《机械工程与自动化》2020年第5期32-35,共4页Mechanical Engineering & Automation

摘　　要：提出了一种基于电液动力学原理的胶膜整平方法,重点分析了电压大小和电极距胶面的距离对胶面整平的影响与规律,并针对部分主要影响因素进行了系统的实验研究。设计并搭建了基于电液动力学的胶膜平整平台及胶厚的扫描测量平台。通过对实验结果的分析,得到了电极间电压大小、电极距胶膜距离等因素对胶膜平整度的影响规律,通过对胶膜厚度的测量结果拟合和仿真验证了基于电液动力学原理的胶膜整平方法的可行性。研究结果为实现胶膜整平提供了一种新途径,为获得微量胶滴及高精度点胶提供了指导。A method of coating leveling based on the principle of electro-hydraulic dynamics is proposed.The emphasis is on the influence and law of the voltage and the distance between the electrode and the glue surface on the glue surface leveling,and a systematic experimental study is carried out for some main influencing factors.Designed and built a film leveling platform based on electro-hydraulic dynamics and a scanning measurement platform for glue thickness.Through the analysis of the experimental results,the influence of the voltage between the electrodes and the distance of the glue film between the electrodes on the flatness of the glue film is obtained.The feasibility of the film leveling method based on the principle of electro-hydraulic dynamics is verified by fitting and simulation of the measurement results of the film thickness.The research results provide a new way to realize the leveling of the adhesive film,and provide guidance for obtaining micro-glue and high-precision dispensing.

关 键 词：胶膜整平 电液动力学 电极间电压 电极距胶面 

分 类 号：TN305.7[电子电信—物理电子学]