高性能声学滤波器技术研究进展  

Research Progress of High Performance Acoustic Filter Technologies

作　　者：李晖[1] 米佳[1] 胡少勤[1] 李左翰 邱海莲 LI Hui;MI Jia;HU Shaoqing;LI Zuohan;QIU Hailian(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;The 24th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Key Lab.of Electromechanical Integration Application Technology of Yunnan,Research Center of Advanced Manufacturing Mechnology of Yunnan,Kunming 650031,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]中国电子科技集团公司第二十四研究所,重庆400060 [3]云南省机电一体化应用技术重点实验室云南省先进制造技术研究中心,云南昆明650031

出　　处：《压电与声光》2020年第5期617-622,共6页Piezoelectrics & Acoustooptics

摘　　要：声学滤波器是当前射频前端模块中最核心元器件之一。随着第五代(5G)移动通信技术的深入推进,对滤波器的技术要求也不断提高。近年来,在一些新架构、新材料和先进建模技术的加持下,声学滤波器技术屡有突破,已研制出多种高性能声学滤波器。该文对高性能声表面波(SAW)和声体波(BAW)滤波器技术(包括UltraSAW、LowDrift TM和NoDrift TM、I.H.P SAW、XBAR TM、XBAW滤波器等)的研究情况进行了介绍与评述。最后对未来声学滤波器将面临的技术问题做了简要总结。Acoustic filter is one of the core components in current RF front-end modules.With the in-depth advancement of the fifth generation(5G)mobile communication technology,the technical requirements for filters have also been continuously improved.In recent years,with the support of some new architectures,new materials and advanced modeling technologies,the acoustic filter technology has continuously made breakthroughs,and many high-performance acoustic filters have also been continuously developed out.In this paper,the research status of some representative high-performance surface acoustic wave(SAW)and bulk acoustic wave(BAW)filter technologies including UltraSAW,LowDrift TM and NoDrift TM,IHP SAW,XBAR TM,XBAW filters,etc.is presented and reviewed.Finally,the technical issues of acoustic filters that will be faced in the future are briefly summarized.

关 键 词：声学 声波 声表面波(SAW) 体声波(BAW) 滤波器 射频前端模块(RFFEM) 第五代移动通信技术(5G) 

分 类 号：TN384[电子电信—物理电子学]