基于双层薄膜热电偶的热障涂层隔温温度精确测量  

Accurate Measurement of Insulation Temperature of Thermal Barrier Coatings Based on Dual Thin-filmThermocouples

作　　者：段力[1] 翁昊天 姬中林 谢子仪 邹兵林 王盈[2] DUAN Li;WENG Hao-tian;JI Zhong-lin;XIE Zi-yi;ZOU Bing-lin;WANG Ying(School of Electronic Information and Electrical Engineering,Shanghai Jiaotong University,Shanghai 200240,China;Changchun Institute of Applied Chemistry,Chinese Academy of Sciences,Changchun 130022,China)

机构地区：[1]上海交通大学电子信息与电气工程学院,上海200240 [2]中国科学院长春应用化学研究所,长春130022

出　　处：《航空发动机》2020年第5期49-54,共6页Aeroengine

摘　　要：为了解决热障涂层隔温温度测量方法缺乏规范性及精确测量体系欠缺的问题,提出在热障涂层上、下两侧制作薄膜型热电偶测量热障涂层隔温温度的试验方案,利用MEMS工艺在热障涂层两侧实现Pt/PtRh薄膜型(<1 um厚)热电偶微制造工艺,进行热障涂层在高温热流动态环境下的隔温效果初步测定试验,并提出1种热障涂层隔温效果的标准化测量体系与测量规范。结果表明:该Pt/PtRh薄膜型传感器可以测量1200℃左右的高温。In order to solve the problems of lack of measurement method standardization and accurate measurement system of thermal barrier coating(TBC),a test scheme of making thin-film thermocouple on both sides of TBC was proposed to measure the insulation temperature of TBC.Micro-manufacturing of Pt/PtRh thin-film(1 um thick)thermocouple was carried out on both sides of TBC by using MEMS process.A preliminary test of thermal insulation effect was carried out for TBC under the dynamic environment of high temperature heat flow,and a standardized measurement system and measurement specification were proposed for insulation effect of TBC.The results show that the Pt/PtRh thin-film sensor can measure about 1200℃high temperature。

关 键 词：热障涂层 温度测量 薄膜传感器 微制造集成技术 隔温温度 航空发动机 

分 类 号：V239[航空宇航科学与技术—航空宇航推进理论与工程]