一种光场均匀性同步采集方案的FPGA实现  

An FPGA Implementation Scheme of LightField Uniformity Data Synchronous Acquisition

作　　者：王景隆 曹益平[1] 杨磊[1] WANG Jing-long;CAO Yi-ping;YANG Lei(College of Electronic Information,Sichuan University,Chengdu 610064,China)

机构地区：[1]四川大学电子信息学院,四川成都610064

出　　处：《光学与光电技术》2020年第5期16-21,共6页Optics & Optoelectronic Technology

基　　金：国家高技术研究发展计划(863计划)(2007AA01Z333);国家科技重大专项(2009ZX02204-008)资助项目。

摘　　要：提出了一种基于FPGA的光场均匀性测量同步采集方案。在大面积光场均匀性测量中,探头步进扫描法需要对大面积光场进行扫描,因此需要同时对光场测量点的光能量值及其坐标值进行采集。该方案通过设计同步采集电路对光场测量点的能量值及三维坐标进行同步采集,并保证了数据的一一对应,实现光脉冲能量和三维坐标的同步自动化采集。通过构建测试平台对光场均匀性测量同步采集方案进行测验,实验结果证明了同步采集方案的可行性和实用性。A data synchronous acquisition scheme of light field uniformity measurement based on FPGA is proposed. In the measurement of the uniformity of large-area light field,the probe step scanning method needs to scan the large-area light field,so it is necessary to collect both the light energy value and its coordinate value of the light field. The energy value and three-dimensional coordinates of the light field measurement points are synchronously collected by designing a synchronous acquisition circuit in this scheme,and the one-to-one correspondence of the data is ensured. So that the synchronous automatic acquisition of the light pulse energy and three-dimensional coordinates is realized. By the construction of the test platform,the synchronous acquisition scheme of light field uniformity measurement is tested. The experimental results show that the synchronous acquisition scheme is feasible and practical.

关 键 词：光场均匀性 光刻机 同步采集 现场可编程门阵列 

分 类 号：TH744.5[机械工程—光学工程]