激光干涉仪在XY工作台测量中的应用  

Application of Laser Interferometer in XY Table Measurement

作　　者：金黎雷[1] JIN Lilei(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2020年第5期37-41,共5页Equipment for Electronic Products Manufacturing

摘　　要：激光干涉位移测量技术是目前位移测量领域的主流技术。其具有分辨率高、测量速度快、溯源好的特点。利用激光干涉位移测量技术,可以实现工作台的高精度测量。首先介绍了目前主要的激光干涉位移测量技术,并对干涉仪的特点进行了分析,最后介绍了激光干涉位移测量在XY工作台定位精度、垂直度测量的应用。Laser interference is the mainstream technology in the field of displacement measurement.It has the characteristics of high resolution,fast measurement speed and good traceability.High precision measurement of XY worktable can be realized in using laser interference displacement measurement technology.First introduces the main technology of laser interference displacement measurement,and analyzes the characteristics of the interferometer.In the final part,the application of laser interference displacement measurement in positioning accuracy and perpendicularity measurement of XY table is introduced.

关 键 词：纳米级 激光干涉 位移测量 

分 类 号：TN247[电子电信—物理电子学]