低g值惯性延时电热MEMS安全与解除保险装置  

Electro-thermal MEMS S&A Device with Low g Value Inertia Delay Mechanism

作　　者：胡腾江 任炜 赵玉龙[1] HU Tengjiang;REN Wei;ZHAO Yulong(Xi'an Jiaotong University, State Key Laboratory for Manufacturing System Engineering, Xi’an 710049, China;Science and Technology on Applied Physical Chemistry Laboratory,Shaanxi Applied Physics and Chemistry Research Institute,Xi'an 710061,China)

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [2]陕西应用物理化学研究所应用物理化学重点实验室,陕西西安710061

出　　处：《探测与控制学报》2020年第5期21-26,共6页Journal of Detection & Control

基　　金：中国博士后科学基金面上项目资助(2018M640977);高校基本科研业务项目资助(xzy012019004)。

摘　　要：针对MEMS安全与解除保险装置解除保险方式单一且不易感知低过载环境力的技术难点,将微尺度下电热力与惯性力结合,提出了低g值惯性延时电热MEMS安全与解除保险装置。该装置主要由硅隔断、齿轮组、平面扭簧以及电热锁销机构组成。分别建立了电热锁销机构以及延时机构的动力学模型,并通过ADAMS软件与ANSYS软件对相应模型进行了仿真验证。结果表明,所设计的锁销机构可以在10 V直流电压的控制下输出57.2μm的位移,满足相应的解锁要求;延时机构可以在10 g环境力(持续时间约700 ms)的作用下,实现560 ms的延时输出。Aiming at the technical difficulties of MEMS S&A device,which has a single release mode and hard to be applied in low G environment,an electro-thermal MEMS S&A device with low G value inertia delay mechanism was proposed in this paper.The device was mainly composed of silicon barrier,gears,plane torsion spring and electro-thermal lock.The dynamic models of the electro-thermal lock and delay mechanism was established,and verified by ADAMS and ANSYS.The results showed that stimulated by 10 V direct voltage,the electro-thermal lock would generate 57.2μm displacement,which could satisfy the unlock requirement.Under 10 g inertial force(lasting about 700 ms),the delay period could reach 560 ms.

关 键 词：MEMS 安全与解除保险装置 低g值惯性延时机构 电热锁销机构 延时机构运动分析 

分 类 号：TJ45[兵器科学与技术—火炮、自动武器与弹药工程]