基于PLC的微焦点X射线源控制系统设计  

Design of Microfocus X-ray Source Control System Based on PLC

作　　者：邓晨晖 牛耕[1,2] 刘俊标 鞠胜[3] 殷伯华 林树峰 韩立[1,2] DENG Chenhui;NIU Geng;LIU Junbiao;JU Sheng;YIN Bohua;LIN Shufeng;HAN Li(Laboratory of Superconductors and New Materials,Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100049,China;Dandong Zhongxun Technology Co.,Ltd.,Dandong Liaoning 118000,China)

机构地区：[1]中国科学院电工研究所超导与新材料应用研究实验室,北京100190 [2]中国科学院大学,北京100049 [3]丹东市中讯科技有限公司,辽宁丹东118000

出　　处：《机床与液压》2020年第20期93-96,共4页Machine Tool & Hydraulics

基　　金：国家重大科学仪器设备开发专项项目(2017YFF0107202);中国科学院关键技术研发团队项目(GJJSTD20170005)。

摘　　要：X射线显微分析技术利用X射线的穿透能力,结合精密定位和数据反演技术,可以在微米甚至亚微米尺度上展现被测样品的内部结构、密度和缺陷等特征信息。该技术已然成为一种重要的物理分析方式,且被广泛应用于生命科学、材料学和先进制造等领域。微焦点X射线源是X射线显微分析系统的核心部件之一,其性能直接影响着系统的测试分辨率和效率。针对微焦点X射线源使用中安全防护升级、工作效率提升、控制精度提高的需求,设计一套基于PLC的微焦点X射线源控制系统,并介绍该系统具体的实现过程。采用JIMA分辨测试卡进行分辨率成像实验,实现了3μm线对的分辨率,证实了该控制系统性能良好,能够满足使用需求。In X-ray microscopy technology,the penetrating ability of X-rays is utilized,combined with precision positioning and data inversion techniques,to reveal the internal structure,density and defects of the sample on micron even submicron scale.It has become an important physical analysis method and has been widely used in the fields of life science,materials science and advanced manufacturing.The microfocus X-ray source is one of the core components of the X-ray microscopy system,and its performance directly affects the system s test resolution and efficiency.Aiming at the requirements of safety protection,work efficiency improvement and control precision in the use of micro-focus X-ray source,according to the composition and working principle of micro-focus X-ray system,a set of PLC-based micro-focus X-ray source control system was designed and its specific implementation process was introduced.JIMA resolution test card was used for resolution imaging experiments,the resolution of the 3 micron pair was achieved.It proves that the control system has good performance and can meet the needs of use.

关 键 词：PLC控制系统设计 微焦点X射线源 微焦点成像 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置]