N2流量对TiN镀层组织结构与力学性能的影响  

Influence of N Flow Rate on Microstructure and Mechanical Properties of TiN Coatings

作　　者：胡鹏飞[1] 李洪涛[2] HU Pengfei;LI Hongtao(School of Materials Science and Engineering,Luoyang Institute of Science and Technology,Luoyang 471023,China;School of Materials Science and Engineering,Nanjing Technology University,Nanjing 211816,China)

机构地区：[1]洛阳理工学院材料科学与工程学院,河南洛阳471023 [2]南京工业大学材料科学与工程学院,江苏南京211816

出　　处：《热加工工艺》2020年第16期102-105,108,共5页Hot Working Technology

基　　金：博士启动基金项目(2012BZ01)。

摘　　要：基于磁控溅射离子镀技术,通过改变N2流量在M2高速钢及单晶硅片上制备TiN镀层,研究N2流量对Ti N镀层组织结构与力学性能的影响。结果表明:在试验条件可控范围内,随着N2流量减小,镀层表面形状由棱锥状结构转变为近似于球的等轴形突起,并且镀层表面颗粒直径明显减小,镀层厚度逐渐增加,截面形貌由典型的柱状晶结构转变为纤维状结构,排列整齐致密,且晶粒明显细化;同时,TiN镀层晶粒生长时的择优生长取向会发生一定的变化,镀层整体的晶化率有变大的趋势,镀层硬度及膜基结合强度都逐渐增加,但镀层韧性逐渐变差。Based on magnetron sputtering ion plating technology, TiN coating was prepared on M2 high speed steel and monocrystalline silicon by changing N2 flow rate. The effects of N2 flow rate on the microstructure and mechanical properties of TiN coating were studied. The results show that, with the decrease of N2 flow rate, the surface shape of the coating changes from pyramid structure to equiaxed protuberance similar to ball in the controllable range of test conditions. The diameter of particles on the surface of the coating decreases obviously, and the thickness of the coating increases gradually. The cross section morphology changes from a typical columnar structure to a fibrous structure, with neat and compact arrangement, and the grain size is obviously refined. At the same time, the preferred growth orientation of TiN coating during grain growth changes in a certain extent. The overall crystallization rate of the coating has the tendency of increasing. The hardness and bonding strength of the coating increase gradually, but the toughness of the coating decreases gradually.

关 键 词：磁控溅射 N2流量 TIN镀层 组织 力学性能 

分 类 号：TG178[金属学及工艺—金属表面处理]