分子束外延制备薄膜虚拟仿真实验教学探索  

Construction of a Virtual Simulation Experiment for Thin Film Preparation by Molecular Beam Epitaxy

作　　者：吴海飞[1] 余国祥[1] 俞立先[1] 梁奇锋[1] 方泽波[1] 高晓辉 李春鹤 张丽英[1] WU Haifei;YU Guoxiang;YU Lixian;LIANG Qifeng;FANG Zebo;GAO Xiaohui;LI Chunhe;ZHANG Liying(School of Mathematics,Physics and Information Science,Shaoxing University,Shaoxing,Zhejiang 312000)

机构地区：[1]绍兴文理学院数理信息学院,浙江绍兴312000

出　　处：《绍兴文理学院学报》2020年第10期68-72,共5页Journal of Shaoxing University

基　　金：浙江省教育厅“十三五”高校虚拟仿真实验教学项目“分子束外延制备薄膜虚拟仿真实验项目”(2019-365).

摘　　要：借助3D MAX建模技术、U3D仿真软件等行业最新的现代化信息技术,开发了分子束外延制备薄膜虚拟仿真实验项目,项目包括实验预习、基础性实验、设计性实验、创新性实验四大递进式实验模块,模块间通过闯关模式晋级,教学过程中以任务为驱动、问题为导向的团队协作互动式实验教学方法.项目开发了动态、开放的分子束外延材料制备数据库平台,源自教学、科研和生产的各类数据将得以不断整合并共享,企业、高校和科研院所的研发人员可以充分交流,有助于形成产、学、研交叉融合的良好环境.Grounded on the latest modern information technology in the industry such as 3 D MAX modeling technology,U3 D simulation software,etc.,a virtual simulation experiment project for the preparation of thin films by MBE was developed,which included four progressive experimental modules:an experimental preview,a basic experiment,a design experiment,and an innovative experiment.Clearance for promotion was set,task-driven,problem-oriented,team collaboration and interactive teaching methods were adopted in the teaching process.In addition,the project creatively developed a dynamic and open MBE material preparation database platform.Through this platform,all kinds of data from teaching,research and production will be continuously integrated and shared.The R&D personnel of enterprises,universities and research institutes can fully communicate,which is helpful to form a good environment for the cross integration of industry,learning,and research.

关 键 词：分子束外延 虚拟仿真实验 薄膜制备 产教融合 实验项目建设 

分 类 号：O48[理学—固体物理]