基于非对称入射和偏振调制的四光束干涉光场  

Four-Beam Interferometric Light Field Based on Asymmetric Incidence and Polarization Modulation

作　　者：彭伏平 严伟[1] 李凡星[1,2] 王思沫 杜佳林 杜婧 Peng Fuping;Yan Wei;Li Fanxing;Wang Simo;Du Jialin;Du Jing(State Key Laboratory of Optical Technologies for Microfabrication,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2020年第19期250-256,共7页Laser & Optoelectronics Progress

基　　金：中科院关键技术创新团队项目(YA17K014);微电子装备四川青年科技创新团队(J17S006)。

摘　　要：建立了多光束干涉场的光强分布数学模型,利用Matlab仿真计算了基于方位角、入射角和偏振角联合调制的四光束干涉光场。分析了光束方位角、入射角和偏振态的变化对多光束干涉的影响,阐释了非对称入射时光场中隔离带现象的生成原因。基于四光束干涉并采用s-s-s-s波的偏振态组合,使其中一束光的方位角旋转180°,并改变入射角,得到一种可用于制备高长宽比椭圆阵列的方法。实验结果表明,方位角、入射角和偏振角共同决定了光束的偏振矢量。由于方位角和入射角两个自由度的引入,非对称入射增加了干涉图案的多样性,使多光束干涉不仅局限于周期性圆孔阵、圆点阵的制备,也为制备多周期、跨尺度图案提供了理论参考。In this paper,a mathematical model of intensity distribution in multi-beam interference field is established,and the four-beam interference light field based on the joint modulation of azimuth angle,incident angle and polarization angle is simulated by Matlab.The influence of changes in beam azimuth angle,incident angle and polarization state on multi-beam interference is analyzed,and the reason for the formation of the isolation band phenomenon in the asymmetric incident light field is explained.Based on the interference of four-beam and the combination of polarization states of s-s-s-s waves,the azimuth angle of one beam is rotated 180°and the incident angle is changed.A method for fabricating high aspect ratio elliptical array is obtained.Experimental results show that the polarization vector of the beam is determined by the azimuth angle,the incident angle and the polarization angle.Due to the introduction of two degrees of freedom of azimuth and incidence angle,the diversity of interference patterns is increased by asymmetric incidence,which makes the multi-beam interference not only limited to the preparation of periodic circular aperture array and circular dot array,but also provides theoretical reference for the preparation of multi period and trans-scale patterns.

关 键 词：激光干涉 非对称入射 偏振调制 跨尺度结构 

分 类 号：O436.1[机械工程—光学工程]