声表面波单向换能结构反射与激励相位耦合模参量的精确简易提取方法  

Accurate and simple extraction method of the phase of mutual-coupling and transduction coefficients for surface acoustic wave unidirectional transducer structure

作　　者：师怡柔 赵旭鹏 杨扬[1] 秦鹏 韩韬[1] SHI Yirou;ZHAO Xupeng;YANG Yang;QIN Peng;HAN Tao(School of Electronic Irformation and Electrical Engineering.Shanghai Jao Tong Unaersity,Shanghai 200240)

机构地区：[1]上海交通大学电子信息与电气工程学院,上海200240

出　　处：《声学学报》2020年第6期906-912,共7页Acta Acustica

基　　金：国家自然科学基金项目(11774230,U1837210)资助。

摘　　要：耦合模模型中的反射相位与激励相位对于精确设计具有电极宽度调制、分布式声反射换能器或自然单向结构的声表面波器件是必不可少的关键参数。传统的相位参量提取需要单独演算声场驻波场,涉及复杂的体波贡献项的推导和计算。为此提出利用有限元软件COMSOL对周期栅格的单个胞元建模,采用谐响应求解器计算得到禁带边缘处的位移驻波场,通过确定驻波节点的位置实现相位精确提取。与已有的研究结果对比,在证实该方法的正确性与有效性的基础上,精确提取了面向耐高温应用的硅酸镓镧(0°,138.5°,26.6°)切型上重金属金电极结构的相位参数,有效的抑制自然单向性,优化设计了单端口声表面波异步谐振器,仿真与实验结果吻合。The phases of mutual-coupling and transduction coefficients in coupling-of-modes are essential parameters for accurately design of surface acoustic wave devices with electrode width control,distributed acoustic reflection transducers or natural single-phase unidirectional periodic structures.The traditional method of the phase extraction requires to separate calculation of the standing wave field,which involves the derivation and calculation of the complicated bulk wave contribution.Thus,the single cell model of periodic grating is established in finite element software COMSOL.The harmonic response solver is utilized to calculate the standing wave field at the edge of stop band.By determining the position of the standing wave nodes,the accurate phase extraction is realized.Specifically,our results agree well with the earlier reported ones.The correctness and effectiveness of the method are verified.After accurately extracting the phase parameters on(0°,138.5°,26.6°)langasite cut with heavy metal gold electrodes,which is widely used in high-temperature applications,the natural single-phase unidirectional transducer effect is suppressed.One-port surface acoustic wave asynchronous resonator is designed.Our simulation results coincide with the experimental results.

关 键 词：声表面波 元建模 驻波场 电极结构 硅酸镓镧 COMSOL 反射相位 声反射 

分 类 号：TN65[电子电信—电路与系统]