平面干涉仪参考镜误差标定方法  

Methods for calibration of reference mirror error of flat interferometer

作　　者：于瀛洁[1] 林星羽 陈鼎夫 YU Yingjie;LIN Xingyu;CHEN Dingfu(Applied Optics and Testing Laboratory,School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200072,China)

机构地区：[1]上海大学机电工程与自动化学院应用光学与检测实验室,上海200072

出　　处：《光学技术》2020年第5期523-529,共7页Optical Technique

基　　金：国家自然科学基金“大尺寸光学元件光强传输方程非干涉在位检测方法研究”(51775326)。

摘　　要：针对平面干涉仪参考镜误差的标定方法进行文献综述。根据干涉原理分析了干涉仪系统误差的主要来源,干涉仪测量原理是携带参考面信息的参考光和携带被测面信息的物光发生干涉,若参考平面存在误差则会直接影响最后的测量精度,所以参考平面的精度是干涉仪主要误差来源之一。因此归纳总结了现有的参考平面绝对测量方法,结合国内外相关文献系统地介绍了液面基准法、三平面互检法以及伪剪切法的发展过程,并对各类方法进行了对比分析。最后对该技术领域的发展进行了总结。The scientific literatures about the methods for calibrating the errors from reference mirrors of flat interferometer are reviewed.According to the principle of the interferometer,the main sources of the system errors are analyzed.Interferometer measurement is based on the principle that,the reference light carrying the information about the reference plane interferes with the object light carrying information of the measured plane.If there are errors in the reference plane,the final measurement accuracy will be directly disturbed.Therefore,the accuracy of the reference plane is one of the main sources of errors in the interferometer system.Accordingly,the existed methods for absolute measurement of reference plane are summarized,the development of the liquid level reference method,the three-plane test method and the pseudo-shear method are introduced,and those methods are comparatively analyzed.Finally,a summarization of the technical developments in this field is made.

关 键 词：应用光学 干涉仪 参考镜误差 平面度绝对测量 

分 类 号：O349[理学—固体力学]