平行平板横向剪切干涉仪波前重建精度的研究  

Study on wavefront reconstruction accuracy of parallel plate lateral shearing interferometer

作　　者：周健彪 杨子晗 梁艳梅[1] ZHOU Jian-biao;YANG Zi-han;LIANG Yan-mei(Institute of Modern Optics,Nankai University,Tianjin 300350,China)

机构地区：[1]南开大学现代光学研究所,天津300350

出　　处：《光电子．激光》2020年第9期921-927,共7页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(61875092,11374167);天津市科技支撑重点项目(17YFZCSY00740)资助项目。

摘　　要：在基于平行平板双光路横向剪切干涉仪中,如果两个方向的平行平板之间存在角度误差,将会使得两个方向的剪切干涉图的剪切方向不正交,最终影响波前测量的准确度。本文通过仿真实验研究了两个方向平行平板之间不同大小的角度误差对波前重建精度的影响,分析了不同条件下Zernike多项式系数拟合精度、重建波前均方根(RMS)及均方根误差(RMSE)与角度误差之间的关系以及角度误差一定时,重建波前RMS及RMSE与剪切量之间的关系。研究结果表明,为了提高波前重建精度,要尽量降低两个平行平板之间的角度误差,使用更多项Zernike多项式来拟合波前,并且保证剪切量与波面尺寸比值大于10%。本文的结论对于平行平板横向剪切干涉仪的装调将会起到一定的指导作用。For the parallel plate lateral shearing interferometer,if there is an angle error between the parallel platesin the two directions,the shearing interferograms of two directions are not orthogonal,accuracy of wavefrontmeasurement will be worsened.In order to analyze the influence of the angle error between the parallel plates on theaccuracy of the wavefront measurement,accuracy of wavefront reconstruction is studied through simulationexperiments,and the relationships among the fitting accuracy of Zernike polynomial coefficients,the root meansquare(RMS)and root mean square error(RMSE)of the reconstructed wavefront and the angle error of the parallelplate are analyzed.The relationships of the RMS and RMSE of the reconstructed wavefront and the shear areanalyzed when the angle error is constant.It is shown that the angle error between two parallel plates should bereduced to improve the accuracy of wavefront reconstruction,more Zernike polynomials should be used to fit thewavefront,and the ratio of shear to wavefront size should be greater than 10%.The conclusions of this paper willplay a guiding role in the installation and adjustment of the parallel plate lateral shearing interferometer.

关 键 词：横向剪切干涉仪 平行平板 角度误差 波前重建 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术]