基于SAW技术的压力传感器设计研究  

On Pressure Sensor Design Based on SAW Technology

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作  者:包宋建[1] 陈文波[1,2] 杨文耀 BAO Song-jian;CHEN Wen-bo;YANG Wen-yao(School of Electron and Electrical Engineering, Chongqing University of Arts and Sciences, Chongqing 402160, China;Chongqing Engineering Research Center of New Energy Storage Devices and Applications, Chongqing 402160, China)

机构地区:[1]重庆文理学院电子电气工程学院,重庆永川402160 [2]重庆市高校新型储能器件及应用工程研究中心,重庆402160

出  处:《西南师范大学学报(自然科学版)》2020年第11期66-72,共7页Journal of Southwest China Normal University(Natural Science Edition)

基  金:国家自然科学基金项目(11804038);重庆市博士后科研项目(Xm2017051);重庆市高校新型储能器件及应用工程研究中心开放课题(KF20180204).

摘  要:将声表面波(SAW)传感原理引入无源无线压力传感器设计,以新型材料硅酸镓镧作为压电基片材料,将2个反射栅的相位差作为压力传感器的输出信号,从而部分消除了环境温度变化带来的影响.设计较高的声表器件中心频率(433.92 MHz附近),从而提高了传感器的灵敏度.叉指换能器(IDT)的叉指对数设计既满足抑制旁瓣的要求,又满足声表面波激发能量的要求.对SAW压力传感器件的结构进行理论分析,采用计算机软件进行了建模和仿真.实验结果表明:以新型材料作为基片,以相位差作为输出信号,以433.92 MHz作为中心频率,并选择合适的叉指对数设计的压力传感器具有温度性能好、灵敏度高、测量误差小和压力相位差特性好的优点.The principle of surface acoustic wave(SAW)sensor is introduced into the design of passive wireless pressure sensor.A new material,lanthanum gallium silicate is used as the piezoelectric substrate material.The phase difference between two reflecting gratings is used as the output signal of the pressure sensor.The effect of ambient temperature change is partly eliminated.A higher center frequency(around 433.92 MHz)is designed to improve the sensitivity of the sensor.The interdigital logarithm design of interdigital transducer(IDT)meets the requirement not only of suppressing sidelobes,but also of excitation energy of surface acoustic wave.The structure of SAW pressure sensor is theoretically analyzed.Computer software is used for modeling and simulation.The experimental results show that the pressure sensor designed with the new material as substrate,phase difference as output signal,433.92 MHz as center frequency and suitable interdigital logarithm has the characteristics of high sensitivity,small error and good pressure phase difference.

关 键 词:SAW技术 相位差 中心频率 叉指换能器 压电基片 

分 类 号:TP212[自动化与计算机技术—检测技术与自动化装置]

 

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