基于柔性衬底WO3薄膜的制备及其电致变色器件研究进展  

Progress on preparation of WO3 thin film based on flexible substrates and their electrochromic devices

作　　者：文哲 王美涵[1] 雷浩[2] 黄奕博 马佳玉 侯朝霞[1] 张钧[1] WEN Zhe;WANG Meihan;LEI Hao;HUANG Yibo;MA Jiayu;HOU Zhaoxia;ZHANG Jun(School of Mechanical Engineering,Shenyang University,Shenyang 110044,China;Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China)

机构地区：[1]沈阳大学机械工程学院,沈阳110044 [2]中国科学院金属研究所,沈阳110016

出　　处：《功能材料》2020年第11期11069-11075,共7页Journal of Functional Materials

基　　金：辽宁省高等学校创新人才支持计划资助项目(LR2019044);沈阳市中青年科技创新人才支持计划资助项目(RC190359);辽宁省自然科学基金指导计划资助项目(20180550727,2019-ZD-0540);广西信息材料重点实验室开放课题资助项目(191007-K)。

摘　　要：柔性衬底具有成本低、形变能力强等优点。在柔性衬底上沉积电致变色性能优异的三氧化钨(WO3)薄膜拓展了电致变色器件在可穿戴电子设备、防眩目眼镜和军事伪装等领域的应用。本文比较了适用于电致变色器件的不同柔性衬底;介绍了在柔性衬底上制备纳米结构WO3薄膜的方法;综述了基于柔性衬底WO3薄膜的电致变色性能;最后提出柔性电致变色器件现存问题及未来发展趋势。The flexible substrates have many good characteristics,such as low cost and strong deformability.Tungsten trioxide(WO3)thin films with excellent electrochromic properties deposited on flexible substrates extends the application of electrochromic devices in wearable electronic devices,anti-glare glasses,and military camouflage.In this paper,different flexible substrates suitable to electrochromic devices were compared.Methods to prepare nanostructured WO3 thin films on flexible substrates were introduced.The electrochromic properties based on WO3 thin films deposited on flexible substrates were reviewed.Finally,problems facing on flexible electrochromic devices were proposed and the future development was prospected.

关 键 词：柔性衬底 WO3薄膜 纳米结构 电致变色性能 磁控溅射 

分 类 号：TB34[一般工业技术—材料科学与工程]