基于硅基波导的集成光学相控阵芯片(特邀)  

Silicon Waveguide Based Integrated Optical Phased Array Chips(Invited)

作　　者：刘晓腾 冯吉军 吴昕耀 刘海鹏 张福领[2] 封治华[2] 曾和平[3,4] LIU Xiao-teng;FENG Ji-jun;WU Xin-yao;LIU Hai-peng;ZHANG Fu-ling;FENG Zhi-hua;ZENG He-ping(Shanghai Key Laboratory of Modern Optical System,School of Optoelectronic Information and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;The 27th Research Institute of China Electronics Technology Group Corporation,Zhengzhou 450047,China;State Key Laboratory of Precision Spectroscopy Science and Technology,East China Normal University,Shanghai 200241,China;Chongqing Institute of East China Normal University,Chongqing 401120,China)

机构地区：[1]上海理工大学,光电信息与计算机工程学院,上海市现代光学系统重点实验室,上海200093 [2]中国电子科技集团公司第二十七研究所,郑州450047 [3]华东师范大学精密光谱科学与技术国家重点实验室,上海200241 [4]华东师范大学重庆研究院,重庆401120

出　　处：《光子学报》2020年第11期165-172,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.11774235,61705130,11933005);上海市自然科学基金(No.17ZR1443400);上海市青年科技启明星计划(No.19QA1406100);上海市高校特聘教授(东方学者)岗位计划。

摘　　要：基于芯层厚度为220 nm的绝缘体上硅材料平台,利用光束传播法与有限时域差分法设计了大偏转角度的64路硅基光学相控阵集成芯片.利用电子束光刻等工艺实现了芯片制备,并进行了性能表征.对关键的分束器以及阵列波导远场干涉的光斑图像进行了仿真,仿真结果显示了高于49.7%的分束效率和大于31°的偏转范围.利用标准的绝缘衬底上的硅工艺制作芯片,并进行整体封装.采用基于粒子群算法优化的自反馈电压调制系统进行相位调制.测试结果表明,在电压调制下,光斑产生了大于±30°的水平偏转;同时在1550~1610 nm的波长调制下,垂直范围也有8.4°的偏转.研究结果有望在自动驾驶、无人机导航等领域得到广泛应用.Based on a silicon-on-insulator material platform with a core thickness of 220 nm,a 64-channel silicon-based optical phased array integrated chip with a large deflection angle was designed using the beam propagation method and the finite time domain difference method.The chip was fabricated using electron beam lithography and other processes,and the performance was characterized.The key beam splitter and the far-field interference image of the arrayed waveguide were simulated.The simulation results show a beam splitting efficiency higher than 49.7%and a deflection range greater than 31°.The chip was fabricated using a standard silicon process on an insulating substrate and packaged as a whole.A self-feedback voltage modulation system optimized based on particle swarm algorithm was used for phase modulation.The test results show that under voltage modulation,the light spot produces a horizontal deflection greater than±30°;at the same time,under the wavelength modulation of 1550~1610 nm,the vertical range also has a deflection of 8.4°.It is expected to be widely used in fields such as autonomous driving and unmanned aerial vehicle.

关 键 词：光学相控阵 集成芯片 硅基波导 相位调制 扫描角度 

分 类 号：TN256[电子电信—物理电子学]