氯化亚铜对多晶硅冷氢化技术中三氯氢硅收率的影响  

Effect of CuCl on the Yield of Trichlorosilane in the Cold Hydrogenation Process of Polysilicon Production

作　　者：毕明锋 BI Mingfeng(Guodian Inner Mongolia Jingyang Energy Limited Company,Ordos 010321,China)

机构地区：[1]国电内蒙古晶阳能源有限公司,内蒙古鄂尔多斯010321

出　　处：《化学反应工程与工艺》2019年第6期524-528,共5页Chemical Reaction Engineering and Technology

摘　　要：提高冷氢化技术中三氯氢硅的收率是多晶硅生产以及有机硅行业急需解决的技术难题。在对工艺装置的温度、压力等技术参数基本达到最优的情况下,添加催化剂成为提高冷氢化三氯氢硅收率的一项重要措施。在反复比选并调研其他企业的铜基催化剂、镍基催化剂、镍铜催化剂使用情况后,本实验选用CuCl作为催化剂,通过并行考察两套相同配置的生产装置中有无催化剂的对比实验,验证了氯化亚铜催化剂可以提高冷氢化三氯氢硅收率,在反应器中采用氯化亚铜催化剂将三氯氢硅的体积百分收率从24%提高至约30%。Improving the yield of trichlorosilane in cold hydrogenation process is an urgent technical problem for polysilicon production and silicone industry.The use of catalyst is considered to be an important measure to improve the yield of trichlorosilane in this technology when the operating parameters such as temperature and pressure are basically optimized.CuCl was selected as catalyst in this experiment after repeatedly comparing and investigating the use of copper based catalyst,nickel based catalyst and nickel copper catalyst in other enterprises.Through the comparison experiment in two sets of production units of the same configuration with and without catalyst it was verified that cuprous chloride catalyst improved the yield of trichlorosilane in the cold hydrogenation process.The yield of trichlorosilane was increased from 24%to about 30%by using cuprous chloride catalyst in the reactor.

关 键 词：多晶硅 冷氢化技术 三氯氢硅 四氯化硅 氯化亚铜 

分 类 号：TQ264.1[化学工程—有机化工]