微结构模芯电铸工艺分析及系统设计  

Analysis of electroforming process for microstructural core and the system design

作　　者：蒋炳炎[1] 强军 刘宇杰 罗坤杰 董彦灼 JIANG Bing-yan;QIANG Jun;LIU Yu-jie;LUO Kun-jie;Dong Yan-zhuo(State Key Laboratory of High-Performance Complex Manufacturing,Central South University,Changsha,Hunan 410083,China)

机构地区：[1]中南大学高性能复杂制造国家重点实验室,湖南长沙410083

出　　处：《模具工业》2020年第12期68-71,共4页Die & Mould Industry

基　　金：国家自然科学基金重点国际合作项目(51920105008);湖南省研究生创新项目(CX20190113)。

摘　　要：传统机加工方法难以保证微/纳尺度结构模芯的加工精度,精密电铸法操作简单、生产成本低、成型精度高,已成为微/纳结构模芯重要的加工方法。设计了一套用于微结构模芯电铸系统,系统具有的特点:模块化设计,简单修改可适用多种模芯尺寸的加工;采用真空唇装夹阴极,密封好防止漏液;添加了PH、水位传感器,可有效实现PH及水位控制。最后以微流控芯片为例,得到了微结构复制质量高、表面平整的型芯。The traditional machining method is difficult to ensure the machining precision of micro/nano scale structure core.Precision electroforming had become an important machining method for micro/nano structure core,due to its simple operation,low production cost,and high forming precision.A set of electroforming system for micro-structure core was designed,which has the following characteristics:modular design,simple modification could be applied to the process variety of cavity sizes.Vacuum lip was adopted to clamp cavity plate,which was sealed well and without leakage.PH and water level sensors were added to realize PH and water level control effectively.Finally,the microfluidic chip was used as an example to obtain the core with high quality of microstructure replication and flat surface.

关 键 词：微电铸 微结构型芯 模块化设计 真空装夹 

分 类 号：TG76[金属学及工艺—刀具与模具] TQ153.4[化学工程—电化学工业]