T2紫铜平面微弹簧疲劳性能研究  

Fatigue Performance of T2 Copper Planar Micro-spring

作　　者：刘鸿志 詹晓非 LIU Hongzhi;ZHAN Xiaofei(College of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学材料科学与工程学院,南京210094

出　　处：《有色金属工程》2020年第12期38-43,共6页Nonferrous Metals Engineering

基　　金：国家自然科学基金资助项目(51675283)。

摘　　要：平面微弹簧是微机电系统(MEMS)传递机械能和弹性力的关键结构,其疲劳性能直接关系到微机电系统的稳定性和可靠性。制备了线宽0.5 mm的轧制态紫铜平面微弹簧,研究了坯料纤维组织初始角度、厚度和预热处理温度对微弹簧疲劳性能的影响。结果表明:采用轧制获得的纤维组织坯料和适当的纤维组织初始角度,可制备出疲劳性能优于坯料组织为等轴晶的微弹簧,且当初始角度提高至90°时,疲劳性能改善效果最好;厚度越小,失效循环次数越低;预热处理温度增大,等轴晶坯料晶粒尺寸越大,微弹簧疲劳性能越低。Planar micro-spring is the key structure of MEMS to transfer mechanical energy and elastic force.Its fatigue performance is directly related to the stability and reliability of MEMS.Rolled copper planar micro-springs with a line width of 0.5 mm were prepared.The effects of initial fiber structure angle,preheating temperature and thickness on the fatigue properties of the micro-springs were studied.The results show that using a fiber structure blank obtained by rolling and an appropriate initial angle of the fiber structure can produce a micro-spring with fatigue properties superior to that of the blank structure with equiaxed grains.When the initial angle is increased to 90°,the effect of fatigue performance improvement is the optimal;the smaller the thickness is,the lower the failure cycles is;with the increase of preheating temperature,the larger the grain size of equiaxed billet,the lower the fatigue property of micro-spring.

关 键 词：T2紫铜 平面微弹簧 微挤压 纤维组织 疲劳性能 

分 类 号：TG146.1[一般工业技术—材料科学与工程]