脉冲法结温测量中校温曲线随电流变化现象的研究  

Research on the Changing Phenomenon of Temperature Calibration Curve with Current in Junction Temperature Measurement by Pulse Current Method

作　　者：李灏 郑世棋[1] 翟玉卫[1] 刘岩[1] 丁晨[1] 吴爱华[1] Li Hao;Zheng Shiqi;Zhai Yuwei;Liu Yan;Ding Chen;Wu Aihua(The 13th Research Institute,CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《半导体技术》2020年第12期988-992,共5页Semiconductor Technology

摘　　要：以功率二极管为实验对象,研究了大电流条件下脉冲法结温测量中校温曲线随电流变化的现象。通过搭建脉冲法校温曲线测量装置,在不同电流条件下开展了校温数据测试工作。测试结果显示,校温曲线随测试电流大小变化显著。测试电流增大过程中,校温曲线斜率由负转正并不断增大,曲线线性程度减弱。理论分析表明,器件内部串联电阻是导致校温曲线变化的主要原因。对校温曲线随电流变化规律进行分析,可为测试电流选取及校温曲线模型建立提供指导,减小大电流情况下脉冲法测量结温的误差。With power diodes as experiment objects,the phenomenon that the temperature calibration curve changed with current in the junction temperature measurement by pulse current method under large current condition was researched.The measurement equipment for the temperature calibration curve of the pulse current method was built,and the temperature calibration data was mesured under different currents.Test results show that the temperature calibration curve for devices changes obviously with dif-ferent testing currents.Slope of the temperature calibration curve changes from negative to positive and increases continually with the increase of the testing current,during which the linearity becomes weak.Theoretical analysis suggests that the series resistance in device is the main reason of the temperature calibration curve change.Analysis of the changing rule of the temperature calibration curve with current can provide guidance to the choice of testing current and establishment of the curve model,which decreases measuring errors of junction temperature under large current by using pulse current method.

关 键 词：脉冲法 结温测量 功率二极管 校温曲线 串联电阻 

分 类 号：TN307[电子电信—物理电子学]