探针校准用ECR等离子体源特性试验研究  

Experimental study of characteristics of ECR plasma source for probe calibration

作　　者：邓星亮 张书锋[1] 贾军伟[1] 柴昊[1] 王斌[2] 高婷 李鹏 崔爽 李峥 郎昊 刘展[1] DENG Xingliang;ZHANG Shufeng;JIA Junwei;CHAI Hao;WANG Bin;GAO Ting;LI Peng;CUI Shuang;LI Zheng;LANG Hao;LIU Zhan(Beijing Oriental Institute of Measurement and Test,Beijing 100086,China;Beijing Institute of Space Mechanics and Electricity,Beijing 100076,China)

机构地区：[1]北京东方计量测试研究所,北京100086 [2]北京空间机电研究所,北京100076

出　　处：《航天器环境工程》2020年第6期602-609,共8页Spacecraft Environment Engineering

摘　　要：为验证ECR等离子体源作为探针校准装置中标准等离子体发生器的可行性,试验研究微波管电流、气压等不同放电条件对ECR等离子体源的耦合作用,以及放电产生的等离子体特征参数的稳定性、均匀性和重复性。结果表明:在合适的放电条件下,ECR等离子体源产生的等离子体特征参数重复性较好,在300 mm×200 mm的空间范围内分布均匀且在2 h内较稳定。因此,可以在探针校准装置中使用ECR等离子体源作为标准等离子体发生器。This paper explores the feasibility of using a microwave ECR plasma source as a standard plasma generator in a probe calibration device.The coupling of the input power and the air pressure with the plasma source is experimentally studied,as well as the repeatability,the uniformity,and the stability of the characteristic parameters of the plasma.It is shown that under a proper discharge pressure,the characteristic parameters of the ECR plasma source are uniformly distributed within an area of 300 mm×200 mm,and remain stable within two hours,that means a good reproducibility.Therefore,it is feasible to use a microwave ECR plasma source as a standard plasma generator for a probe calibration device.

关 键 词：等离子体源 特征参数 重复性 均匀性 稳定性 试验研究 

分 类 号：TL65[核科学技术—核技术及应用]