一种小型离子泵电源的设计  

Design Optimization of Power Supply for Small Ion-Pump:An Instrumentation Study

作　　者：蔡龙 陈智勇 张扬 吴晓勇 Cai Long;Chen Zhiyong;Zhang Yang;Wu Xiaoyong(Beijing Beifen Instrument Technology Co.,Ltd,Beijing 100095,China)

机构地区：[1]北京市北分仪器技术有限责任公司,北京100194

出　　处：《真空科学与技术学报》2020年第11期1109-1113,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：真空行业的迅速发展对离子泵电源提出了新的需求与挑战,小型轻量、智能控制和节能高效的离子泵电源将成为行业发展趋势。本文提出了一种通用性强的小型离子泵电源的设计方案,介绍了系统组成与拓扑结构,给出了电路参数计算和分析说明,并对该电源进行工程上的测试验证。实践表明,该电源能适配多种型号的离子泵,工作稳定可靠。A novel type of power supply,with the technical strengths,including the high energy efficiency and intelligent control,has been successfully developed to energize the miniature lightweight ion pump.The discussions,with specific calculation and analysis,focused on the circuit design,including but not limited to the push-pull circuit for the transformer,high voltage circuit,voltage sampling circuit,automatic control circuit and protection circuit.A prototyped power supply,with the specifications:input of 26±4 V(DC),output of±5000 V±10%,Max output power of 20 W and short circuit current of 15 mA,was experimentally tested.The results show that the self-developed power supply,with features of light weight,small size,low cost,high stability and good reliability,is compatible to and works well for a variety of commercial available miniature ion pumps.

关 键 词：真空 离子泵电源 开关电源 溅射离子泵 

分 类 号：TN107[电子电信—物理电子学]