多段可控式加热台的性能测试与应用验证  

Property Test and Application Verification of a Multi-stage and Controllable Heating Apparatus

作　　者：王洪宇[1] 王大志 张奇 刘建国 曾晓雁 杨师[1] WANG Hongyu;WANG Dazhi;ZHANG Qi;LIU Jianguo;ZENG Xiaoyan;YANG Shi(The 45th Research Institute of CETC,Beijing 100176,China;Functional Laboratory of Laser and Terahertz Technology,Wuhan National Laboratory of Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176 [2]华中科技大学,武汉光电国家研究中心,激光与太赫兹技术功能实验室,湖北武汉430074

出　　处：《电子工业专用设备》2020年第6期37-41,共5页Equipment for Electronic Products Manufacturing

摘　　要：介绍了一种自主研发的多段可控加热台的系统构造与工作原理,对其相关性能进行了测试,并在介电材料聚酰亚胺的制备过程中,对其进行了实际应用验证。结果表明,该加热台在PLC控制器与温控器的综合控制下,最多可设置12段加热温度曲线,可实现室温至450℃范围内温度的连续调节,升温速率范围为0~20℃/min;在升温速率较小(如1~5℃/min)的情况下,具有温控精度高(优于±1℃)、超调量小、稳定性高等优点;同时,该加热平台使用灵活,既可单独使用,也可集成到其它设备中作为加热附件使用。但由于加热面积大(300 mm×200 mm),当升温速率较大时,也存在加热滞后现象。The structure and principle of a self-made multi-stage and controllable heating apparatus were introduced,and then,its some properties and practical application in the preparation of dielectric material polyimide were tested and verified.It showed that,in the composite control of PLC and temperature controllers,the apparatus had the max.12 heating stages,a temperature range of from room temperature to 450℃,and a heating rate range of from0℃/min to20 ℃/min.In the condition of lower heating rates(e.g.,1~5℃/min),the apparatus had good properties of high temperature-controlling accuracy(above±1℃),low temperature overshoot,and high stability.In addition,the apparatus had the application flexibility of in itself or as an external part of an equipment.However,because of overlarge heating area(300 mm × 200 mm),in the condition of larger heating rates,there existed heating hysteresis.

关 键 词：多段可控式加热平台 性能测试 应用验证 

分 类 号：TN307[电子电信—物理电子学]