近场微波显微镜软接触模式测量介电常数的研究  

Study on the Measurement of Dielectric Constant in Soft Contact Mode of Near-Field Microwave Microscopy

作　　者：黄和 彭斌[1] 曾慧中[1] 鞠量 张万里[1] HUANG He;PENG Bin;ZENG Huizhong;JU Liang;ZHANG Wanli(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都611731

出　　处：《测试技术学报》2020年第6期461-464,480,共5页Journal of Test and Measurement Technology

基　　金：国家重点研发计划资助项目(2017YFB0406401)。

摘　　要：近场微波显微镜测试样品介电常数依赖于针尖与样品的距离,准确控制针尖与样品距离是准确测试介电常数的基础.基于谐振腔谐振频率随针尖-样品距离接近曲线的探究,本文提出了一种准确实现探针与样品软接触的方法,采用软接触模式测量了一系列已知介电常数样品的谐振频率,并对所得的谐振频率-介电常数曲线进行拟合.结果表明,实验结果与理论非常吻合,拟合所得空载谐振频率也与实验一致.本文建立的软接触方法可准确控制针尖与样品的距离,实现介电常数的定量化准确测试.The dielectric constant of a near-field microwave microscopy test sample depends on the distance between the tip and the sample.Accurately controlling the distance between the tip and the sample is the basis for accurate testing of dielectric constant.Based on the exploration of the resonance frequency of the cavity with the tip-sample distance approaching curve,this paper proposes a method to accurately achieve soft contact between the probe and the sample.We used the soft contact mode to measure the resonance frequency of a series of samples with known dielectric constants.The obtained resonance frequency-dielectric constant curve is fitted.The results show that the experimental results are in good agreement with the theory,and the fitted free-load resonance frequency is also consistent with the experiment.The soft contact method established in this paper can accurately control the distance between the needle tip and the sample,and realize the quantitative and accurate measurement of the dielectric constant.

关 键 词：近场微波显微镜 软接触 介电常数 

分 类 号：TB22[天文地球—大地测量学与测量工程]