不锈钢基底碳纳米管阵列制备及基底弯曲研究  

Research on Carbon Nanotube Arrays Grown on Stainless Steel Substrate and Substrate Bending

作　　者：孙成祥 李阳[1,2] 陆明月[2] SUN Chengxiang;LI Yang;LU Mingyue(College of Mechanical and Electrical Engineering,Nanjing university of Aeronautics and Astronautics,Nanjing 210016,China;Jiangsu Key Laboratory of Bionic Functional Materials,Nanjing university of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016 [2]南京航空航天大学江苏省仿生功能材料重点实验室,江苏南京210016

出　　处：《机械制造与自动化》2020年第6期10-12,共3页Machine Building & Automation

基　　金：国家自然科学基金项目(51705247);南京航空航天大学研究生创新基地开放基金项目(kfjj20181501)。

摘　　要：通过化学气相沉积法在不锈钢基底上制备定向度良好的垂直定向碳纳米管阵列。研究中发现在超薄柔性金属基底上制备碳纳米管阵列时,基底会随化学气相沉积过程发生弯曲变形。通过对比实验分析导致基底弯曲的原因,确定了变形与沉积的对应关系。采用预弯曲处理的方法克服了金属基底在制备碳管阵列时发生弯曲的问题。In this paper,vertically aligned carbon nanotube arrays with good orientation is grown on a metal substrate by chemical vapor deposition.It is found that when carbon nanotube arrays is grown on an ultra-thin flexible metal substrate,the substrate bending deformation appears during chemical vapor deposition.The cause of the substrate bending is analyzed,and the corresponding relationship between bending and deposition is determined.In addition,the metal substrate bending appearing during the grown of carbon nanotube arrays is overcome by pre-bending treatment.

关 键 词：垂直定向碳纳米管阵列 化学气相沉积 超薄不锈钢基底 基底弯曲 

分 类 号：TB34[一般工业技术—材料科学与工程]