电机驱动微装配在双光子制备微结构中的应用  

Application of motor driven micro-assembly in two-photon fabrication of micro-structure

作　　者：夏锦涛 丁阿飞 王杭 王刚[1] 陶卫东[1] XIA Jintao;DING Afei;WANG Hang;WANG Gang;TAO Weidong(School of Physical Science and Technology,Ningbo University,Ningbo 315211,China)

机构地区：[1]宁波大学物理科学与技术学院,浙江宁波315211

出　　处：《宁波大学学报（理工版）》2021年第1期65-69,共5页Journal of Ningbo University：Natural Science and Engineering Edition

基　　金：国家自然科学基金(11704204)。

摘　　要：对微结构的制作、微装配系统进行了研究.采用飞秒激光双光子聚合微加工技术制作有底座、精细的三维立体"拱形"微结构,其高250μm、长300μm、厚50μm.将此微结构与实验室自主搭建的二维微装配平台相结合,利用自主编程的人机交互界面驱动步进电机,远程操控微装配设备;将荧光闪烁陶瓷粉末装配到微结构中,对装配后的微结构进行荧光光谱表征发现,纯荧光粉末和微结构中的荧光粉末的发射光谱在测量误差范围内基本一致,表明荧光粉末的光学性质未发生改变.利用该装置可以将各类微纳米级材料和微结构进行装配,形成含有不同材料的微结构系统.In order to study the assembly methods of various micro-nanometer materials and micro-structures,the fabrication of micro-structures and the working mode of micro-assembly systems are first studied.The femtosecond laser two-photon polymerization micro-machining technology is employed to fabricate a fine three-dimensional"arch"micro-structure with a base,with 250μm in height,300μm in length and 50μm in thickness.The micro-structure is combined with the two-dimensional micro-assembly platform independently built in the laboratory,and the self-designed human-computer interface is used to drive the stepping motor.The micro-assembly device can be remotely controlled to assemble the fluorescent scintillation ceramic powder(hereinafter referred to as fluorescent powder)into the micro-structure.Through the fluorescence spectrum characterization of the assembled micro-structure,the results show that the emission spectrum of the pure fluorescent powder and the fluorescent powder in the micro-structure is basically the same within the measurement error range,and the optical properties of the fluorescent powder remain unchanged.Through this experimental device,we can implement the electric assembly of fluorescent powder and micro-structure without affecting the properties of fluorescent powder.We can also use this device to assemble a vast variety of micro-nanometer materials and micro-structure so as to form the micro-structure system with different materials.

关 键 词：双光子 微装配 步进电机 荧光粉末 远程操控 

分 类 号：O437[机械工程—光学工程]