基于PN结级联光源的全硅光电生物传感器  

All-silicon Photoelectric Biosensor Based on PN Junction Cascade Light Source

作　　者：杨永晖[1] 艾康 朱坤峰 赵建明[2] 徐开凯 YANG Yong-hui;AI Kang;ZHU Kun-feng;ZHAO Jian-ming;XU Kai-kai(The 24th Research Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;State Key Laboratory of Electronic Thin Films and Integrated Devices of University of Electronic Science and Technology of China,Chengdu 610054,China)

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060 [2]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《光电技术应用》2020年第6期43-49,共7页Electro-Optic Technology Application

摘　　要：基于硅基光源且与CMOS工艺兼容的全硅光电生物传感器,其光源低发光效率导致检测低灵敏度,尚不能大规模应用。对此,文中研究了多晶硅PN结级联光源及新型全硅光电生物传感器,包括PN结级联的多晶硅光源的发光机制、波导传输机理、波导生物检测技术。研制的多晶硅PN结级联光源发光效率高达4.3×10^-6,可与波导高效耦合。仿真表明,波导检测区域介质折射率在1.33-1.73之间变化时,介质折射率增加使得光能量更少回到波导内芯,波导内芯传输光强随介质折射率增加而下降,通过光强变化实现介质折射率传感。At present, all-silicon photoelectric biosensors based on silicon-based light sources and compatible with complementary metal oxide semiconductor(CMOS) technology have low luminous efficiency of the light source,resulting in low detection sensitivity, and cannot be applied on a large scale. In response to this problem, the polysilicon PN junction cascade light source and a new all-silicon photoelectric biosensor are researched, including the luminescence mechanism of the PN junction cascade polysilicon light source, waveguide transmission mechanism and waveguide biological detection technology. The developed polysilicon PN junction cascade light source has a luminous efficiency of 4.3×10-6, which can be efficiently coupled with a waveguide. Simulation results show that when the refractive index of the medium in the detection area of the waveguide changes between 1.33 and 1.73, the increase in the refractive index of the medium makes the light energy less return to the inner core of the waveguide, so the transmitted light intensity in the inner core of the waveguide decreases with the increasing in the refractive index of the medium. And medium refractive index sensing is realized through the changing of light intensity.

关 键 词：全硅光电生物传感器 CMOS工艺 发光效率 光源-波导耦合 PN结级联光源 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]