纳米压印技术在制造领域的应用  

Application of nanoimprint technology in manufacturing

作　　者：姚志军 Yao Zhijun(School of Mechatronics&vehicle Engineering,Chongqing Jiaotong University,Chongqing 400074,China)

机构地区：[1]重庆交通大学机电与车辆工程学院,重庆400074

出　　处：《印制电路信息》2020年第12期51-56,共6页Printed Circuit Information

摘　　要：微纳米加工技术作为一种典型的先进制造技术,其制造精度可达到纳米级别,在小型甚至微型元器件、微型芯片及生物传感器的制造、批量化生产中具有不可取代的作用。纳米压印技术作为新型的光刻技术,具有成本低、分辨率高、效率高、制造流程便捷等优点。文章围绕纳米压印技术的主流方法进行介绍,对纳米热压印、紫外纳米压印、纳米电极光刻等方法的特点及原理进行了阐述,并对纳米压印技术的应用做出了总结和展望。As a typical advanced manufacturing technology,micro-nano processing technology can achieve nanometer level of manufacturing precision and has an irreplaceable role in the manufacture and mass production of small and even micro components,microchips and biosensors.As a new type of lithography technology,nanoimprint technology is expected to become the mainstay of the future micro-nano technology.This paper introduces the mainstream methods of nanoimprint technology,and expounds the characteristics and principles of nano-embossing,ultraviolet nanoimprinting,nano-electrode lithography,etc.,and makes the summary and outlook of application of nanoimprint technology.

关 键 词：微纳米加工技术 纳米热压印 紫外纳米压印 纳米电极光刻 

分 类 号：TN41[电子电信—微电子学与固体电子学]