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作 者:李中亮 杨俊亮 朱晔 薛莲 宋丽 LI Zhong-liang;YANG Jun-liang;ZHU Ye;XUE Lian;SONG Li(Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201204, China;Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;University of Chinese Academy of Sciences, Beijing 100049, China)
机构地区:[1]中国科学院上海高等研究院上海同步辐射装置,上海201204 [2]中国科学院北京高能物理研究所北京同步辐射装置,北京100049 [3]中国科学院大学,北京100049
出 处:《光学精密工程》2020年第9期1950-1957,共8页Optics and Precision Engineering
基 金:国家自然科学基金青年基金资助项目(No.11505279,No.11605279)。
摘 要:为了精确测量加工、夹持、装调等工艺引起的晶体摇摆曲线的微小变化,建立了高分辨的在线检测系统。研究了同步辐射实验配置对晶体摇摆曲线的影响。首先利用DuMond图解法定性分析了不同实验配置中光束带宽和角发散的影响,根据DuMond图解结果和X射线晶体动力学衍射理论,推导出晶体摇摆曲线宽度的经验公式。然后研究了同步辐射在线检测系统提升角分辨率的方法,利用高指数面的Si(333)切槽晶体、Si(775)定能量分析晶体抑制光束的带宽和角发散,调制出高分辨的检测光束。最后在上海光源X光学测试线搭建了检测系统,测量了Si(111)晶体摇摆曲线并验证了经验公式。实验结果表明,Si(111)晶体摇摆曲线半高宽的测量值4.79″@12.763 keV,与动力学衍射的理论值4.70″差值在2%以内,可满足晶体摇摆曲线微小变化的检测需求。A high-resolution detection system was established on a beamline to accurately measure the slight broadening of crystal rocking curves,caused by cutting,clamping,adjustment,and other processes.Further,the effect of the configuration of the synchrotron radiation experiment on the rocking curve of a crystal was studied.First,the effects of different experimental configurations on the beam bandwidth and angular divergence were analyzed by producing DuMond diagrams.Using the DuMond diagram results and X-ray crystal dynamics diffraction theory,an empirical formula for the rocking curve width was derived.Moreover,a method to improve the angular resolution of the synchrotron radiation detection system was studied.A high-index surface Si(333)channel-cut crystal and a Si(775)monolithic double-crystal monochromator are used to suppress the bandwidth and angular divergence of the beam and modulate a high-resolution detection beam.Finally,a detection system was built on the X-ray test beamline at the Shanghai Synchrotron Radiation Facility.The rocking curve of the Si(111)crystal was measured by the system,and the measured result verified the empirical formula.The experimental results show that the measured value of the full width at half-maximum for the rocking curve of the Si(111)crystal is 4.79″at 12.763 keV.This measured value is within 2%of the theoretical value of 4.70″for dynamical diffraction,allowing small changes in the rocking curves of crystals to be detected.
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