时栅测角系统误差自动采样及补偿研究  

Automatic sampling and compensation of error intime grating angle measuring system

作　　者：张天恒[1,2] 王阳阳[1,2] 武亮[1,2] 郑永[1,2] ZHANG Tian-heng;WANG Yang-yang;WU Liang;ZHENG Yong(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]重庆理工大学时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《机电工程》2021年第1期113-118,共6页Journal of Mechanical & Electrical Engineering

基　　金：国家重大科研仪器研制资助项目(51827805);重庆市科技计划资助项目(cstc2017jcyjax0400,cstc2017jcyjax0392);重庆市高等学校优秀人才支持计划资助项目(201717);重庆理工大学研究生创新资助项目(ycx20192021)。

摘　　要：由于时栅测角系统受限于校准器的运动和装配环境,难以使用光栅作为精度基准仪器来进行密集的误差采样。为了实现较高精度的测量,通过对时栅测角系统的位移解算和对磁场式Ⅱ型时栅传感器结构进行了剖析,利用稀疏采样误差数据开展了频谱研究,得到了测角系统的补偿模型;提出了一种基于激光干涉仪的时栅测角系统误差自动稀疏采样及补偿的方法,采用了量子粒子群算法对补偿模型进行了求解,从中获取了17个补偿参数,并将其应用到补偿模型中,对测角系统进行了误差补偿。研究结果表明:在稀疏采样的条件下,采用该方法能够快速、准确地实现对时栅测角系统误差进行自动补偿,且补偿后的时栅测角系统的精度达到2.88″。Aiming at the limitation of the movement and installation of the calibrator and the assembly environment,it was difficult to use grating as the precision reference instrument for dense error sampling to achieve high precision measurement.Through the displacement calculation of the time grating angle measuring system and the analysis of the structure of the magnetic field II time grating sensor,the frequency spectrum research was carried out by using the sparse sampling error data,and the compensation model of the angle measuring system was obtained.An automatic sparse sampling and compensation method of time grating angle measurement system error based on laser interferometer was designed.17 compensation parameters in the compensation model were solved by quantum particle swarm optimization algorithm,and the compensation model was used to compensate the error of angle measurement system.The results indicate that under the condition of sparse sampling,it can quickly and accurately realize automatic error compensation of time grating angle measurement system,and the accuracy of time grating angle measurement system can reach 2.88″.

关 键 词：时栅测角系统 稀疏采样 补偿模型 量子粒子群算法 

分 类 号：TH822[机械工程—仪器科学与技术] TP212.12[机械工程—精密仪器及机械]