基于PLD溅射Al2O3薄膜的声表面波温度传感器的研究  

Research on Surface Acoustic Wave Temperature Sensor Based on PLD Sputtering Al2O3 Thin Film

作　　者：周煦航 郭涛[1] 梁晓瑞 谭秋林[1] 甘宇 ZHOU Xu-hang;GUO Tao;LIANG Xiao-rui;TAN Qiu-lin;GAN Yu(Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)

机构地区：[1]仪器科学与动态测试教育部重点实验室,中北大学,山西太原030051

出　　处：《仪表技术与传感器》2020年第12期105-109,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(U1837209)。

摘　　要：通过脉冲激光沉积系统沉积Al2O3薄膜层作为电极的防护层的声表面波温度传感器。在0~1300℃高温测试中,温度传感器的谐振频率随着温度的增加而减小。声表面波器件在1100℃环境下稳定工作了80 min,最后通过扫描电子显微镜(SEM)观察薄膜的表面形貌,原子力显微镜(AFM)对传感器进行表面粗糙测定、颗粒度解析。根据这些结果,提出了一种可以明显延长高温下声表面波器件的Pt电极的寿命的方法。Al2O3 thin film is deposited by the pulsed laser deposition system as the protection layer of the electrode,and the surface acoustic wave temperature sensor.In the high temperature test from 0℃to 1300℃,the resonant frequency of the temperature sensor decreased with the increase of temperature and the surface acoustic wave device worked stably for 80 min at 1100℃.Finally,the surface morphology of the thin film was observed by scanning electron microscope(SEM),and the surface roughness and particle size analysis of the sensor were performed by atomic force microscope(AFM).Based on these results,a method that can significantly extend the life of Pt electrode of surface acoustic wave devices at high temperature was proposed.

关 键 词：PT/TI电极 硅酸镓镧 温度传感器 Al2O3防护薄膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]