微型溅射离子泵放电模拟与抽气特性研究  

Discharge Simulation and Pumping Characteristics of Micro Sputtering Ion Pump

作　　者：耿健 郭美如[2] 王晓冬[1] 张世伟[1] 成永军[2] 孙雯君[2] 黄海龙[1] 李海涛[1,2] 任正宜 吴成耀 GENG Jian;GUO Meiru;WANG Xiaodong;ZHANG Shiwei;CHENG Yongjun;SUNWenjun;HUANG Hailong;LI Haitao;REN Zhengyi;WU Chengyao(Northeast University,Shenyang 110004,China;Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]东北大学,沈阳110004 [2]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2021年第1期45-51,共7页Vacuum and Cryogenics

基　　金：国家自然科学基金项目(61971209);国家重大科学仪器设备开发专项(2017YFF0105801)。

摘　　要：为了解溅射离子泵抽气过程中内部放电与抽速的关系,考虑了N2分子的激发、电离及粒子之间的弹性碰撞等过程,利用COMSOL软件对微型溅射离子泵内部气体放电进行了数值模拟研究。得到了电子密度、温度、粒子轨迹、入射角度及入射能量的分布变化,并分析了这些因素对抽速的影响。在搭建的实验平台上对微型溅射离子泵进行了抽速测量,得到了不同工作电压下抽速随压力变化的曲线,并与理论抽速相对比,模拟结果、实验数据与理论抽速有较好的一致性。对溅射离子泵的设计与改进具有参考价值。In order to understand the relationship between the internal discharge and the pumping velocity in the sputtering ion pump,the ionization,excitation and elastic collision of nitrogen molecules,and the gas discharge in the miniature sputtering ion pump was numerically simulated by using COMSOL software.The distribution of electron density,temperature,particle trajectory,and incident angle and incident energy were obtained,and analyze the influence of these factors on the pumping speed.The pumping speed of the micro sputtering ion pump was measured on the experimental platform,and the curves of the pumping speed with the pressure under different working voltage were obtained,and compared with the theoretical pumping speed.The simulation results and experimental data were in good agreement with the theoretical pumping speed.It has reference value for the design and improvement of sputtering ion pump.

关 键 词：微型溅射离子泵 放电模拟 极小抽速 抽气特性 

分 类 号：TB75[一般工业技术—真空技术]